5/16/2011	9:01:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/16/2011	9:01:08 AM	Recipe started at 9:01 AM
5/16/2011	9:01:08 AM	H2 valve closed
5/16/2011	9:01:08 AM	BCl3 valve closed
5/16/2011	9:01:08 AM	PH3 valve closed
5/16/2011	9:01:08 AM	SiCl4 pre valve closed
5/16/2011	9:01:08 AM	SiCl4 post valve closed
5/16/2011	9:01:08 AM	Main Vac valve closed
5/16/2011	9:01:08 AM	Bypass valve closed
5/16/2011	9:01:08 AM	Bubbler valve closed
5/16/2011	9:01:08 AM	Helium valve opened
5/16/2011	9:01:08 AM	Helium MFC set to  500.000000
5/16/2011	9:01:08 AM	H2 MFC set to  0.000000
5/16/2011	9:01:08 AM	BCl3 MFC set to  0.000000
5/16/2011	9:01:08 AM	PHl3 MFC set to  0.000000
5/16/2011	9:01:08 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:01:08 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:01:09 AM	Tube furnace set to 0
5/16/2011	9:02:27 AM	Helium valve closed
5/16/2011	9:02:27 AM	H2 valve closed
5/16/2011	9:02:27 AM	BCl3 valve closed
5/16/2011	9:02:27 AM	PH3 valve closed
5/16/2011	9:02:27 AM	SiCl4 pre valve closed
5/16/2011	9:02:27 AM	SiCl4 post valve closed
5/16/2011	9:02:27 AM	Main Vac valve closed
5/16/2011	9:02:27 AM	Bypass valve closed
5/16/2011	9:02:27 AM	Bubbler valve closed
5/16/2011	9:02:27 AM	Helium MFC set to  0.000000
5/16/2011	9:02:27 AM	H2 MFC set to  0.000000
5/16/2011	9:02:27 AM	BCl3 MFC set to  0.000000
5/16/2011	9:02:27 AM	PHl3 MFC set to  0.000000
5/16/2011	9:02:27 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:02:27 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:02:27 AM	Tube furnace set to 0
5/16/2011	9:02:28 AM	Run finished at 9:02 AM
5/16/2011	9:02:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/16/2011	9:09:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/16/2011	9:10:06 AM	Recipe started at 9:10 AM
5/16/2011	9:10:06 AM	Helium valve closed
5/16/2011	9:10:06 AM	H2 valve closed
5/16/2011	9:10:06 AM	BCl3 valve closed
5/16/2011	9:10:06 AM	PH3 valve closed
5/16/2011	9:10:06 AM	SiCl4 pre valve closed
5/16/2011	9:10:06 AM	SiCl4 post valve closed
5/16/2011	9:10:06 AM	Main Vac valve closed
5/16/2011	9:10:06 AM	Bubbler valve closed
5/16/2011	9:10:06 AM	Bypass valve opened
5/16/2011	9:10:06 AM	Helium MFC set to  0.000000
5/16/2011	9:10:06 AM	H2 MFC set to  0.000000
5/16/2011	9:10:06 AM	BCl3 MFC set to  0.000000
5/16/2011	9:10:06 AM	PHl3 MFC set to  0.000000
5/16/2011	9:10:06 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:10:06 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:10:06 AM	Tube furnace set to 0
5/16/2011	9:10:38 AM	Helium valve closed
5/16/2011	9:10:38 AM	H2 valve closed
5/16/2011	9:10:38 AM	BCl3 valve closed
5/16/2011	9:10:38 AM	PH3 valve closed
5/16/2011	9:10:38 AM	SiCl4 pre valve closed
5/16/2011	9:10:38 AM	SiCl4 post valve closed
5/16/2011	9:10:38 AM	Bubbler valve closed
5/16/2011	9:10:38 AM	Main Vac valve opened
5/16/2011	9:10:38 AM	Bypass valve opened
5/16/2011	9:10:38 AM	Helium MFC set to  0.000000
5/16/2011	9:10:38 AM	H2 MFC set to  0.000000
5/16/2011	9:10:38 AM	BCl3 MFC set to  0.000000
5/16/2011	9:10:38 AM	PHl3 MFC set to  0.000000
5/16/2011	9:10:38 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:10:38 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:10:39 AM	Tube furnace set to 0
5/16/2011	9:11:39 AM	H2 valve closed
5/16/2011	9:11:39 AM	BCl3 valve closed
5/16/2011	9:11:39 AM	PH3 valve closed
5/16/2011	9:11:39 AM	SiCl4 pre valve closed
5/16/2011	9:11:39 AM	SiCl4 post valve closed
5/16/2011	9:11:39 AM	Bubbler valve closed
5/16/2011	9:11:39 AM	Helium valve opened
5/16/2011	9:11:39 AM	Main Vac valve opened
5/16/2011	9:11:39 AM	Bypass valve opened
5/16/2011	9:11:39 AM	Helium MFC set to  100.000000
5/16/2011	9:11:39 AM	H2 MFC set to  0.000000
5/16/2011	9:11:39 AM	BCl3 MFC set to  0.000000
5/16/2011	9:11:39 AM	PHl3 MFC set to  0.000000
5/16/2011	9:11:39 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:11:39 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:11:39 AM	Tube furnace set to 0
5/16/2011	9:12:39 AM	Helium valve closed
5/16/2011	9:12:39 AM	H2 valve closed
5/16/2011	9:12:39 AM	BCl3 valve closed
5/16/2011	9:12:39 AM	PH3 valve closed
5/16/2011	9:12:39 AM	SiCl4 pre valve closed
5/16/2011	9:12:39 AM	SiCl4 post valve closed
5/16/2011	9:12:39 AM	Bubbler valve closed
5/16/2011	9:12:39 AM	Main Vac valve opened
5/16/2011	9:12:39 AM	Bypass valve opened
5/16/2011	9:12:39 AM	Helium MFC set to  0.000000
5/16/2011	9:12:39 AM	H2 MFC set to  0.000000
5/16/2011	9:12:39 AM	BCl3 MFC set to  0.000000
5/16/2011	9:12:39 AM	PHl3 MFC set to  0.000000
5/16/2011	9:12:39 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:12:39 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:12:39 AM	Tube furnace set to 0
5/16/2011	9:13:39 AM	H2 valve closed
5/16/2011	9:13:39 AM	BCl3 valve closed
5/16/2011	9:13:39 AM	PH3 valve closed
5/16/2011	9:13:39 AM	SiCl4 pre valve closed
5/16/2011	9:13:39 AM	SiCl4 post valve closed
5/16/2011	9:13:39 AM	Bubbler valve closed
5/16/2011	9:13:39 AM	Helium valve opened
5/16/2011	9:13:39 AM	Main Vac valve opened
5/16/2011	9:13:39 AM	Bypass valve opened
5/16/2011	9:13:39 AM	Helium MFC set to  100.000000
5/16/2011	9:13:39 AM	H2 MFC set to  0.000000
5/16/2011	9:13:39 AM	BCl3 MFC set to  0.000000
5/16/2011	9:13:39 AM	PHl3 MFC set to  0.000000
5/16/2011	9:13:39 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:13:39 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:13:39 AM	Tube furnace set to 0
5/16/2011	9:14:39 AM	Helium valve closed
5/16/2011	9:14:39 AM	H2 valve closed
5/16/2011	9:14:39 AM	BCl3 valve closed
5/16/2011	9:14:39 AM	PH3 valve closed
5/16/2011	9:14:39 AM	SiCl4 pre valve closed
5/16/2011	9:14:39 AM	SiCl4 post valve closed
5/16/2011	9:14:39 AM	Bubbler valve closed
5/16/2011	9:14:39 AM	Main Vac valve opened
5/16/2011	9:14:39 AM	Bypass valve opened
5/16/2011	9:14:39 AM	Helium MFC set to  0.000000
5/16/2011	9:14:39 AM	H2 MFC set to  0.000000
5/16/2011	9:14:39 AM	BCl3 MFC set to  0.000000
5/16/2011	9:14:39 AM	PHl3 MFC set to  0.000000
5/16/2011	9:14:39 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:14:39 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:14:39 AM	Tube furnace set to 0
5/16/2011	9:15:39 AM	H2 valve closed
5/16/2011	9:15:39 AM	BCl3 valve closed
5/16/2011	9:15:39 AM	PH3 valve closed
5/16/2011	9:15:39 AM	SiCl4 pre valve closed
5/16/2011	9:15:39 AM	SiCl4 post valve closed
5/16/2011	9:15:39 AM	Bubbler valve closed
5/16/2011	9:15:39 AM	Helium valve opened
5/16/2011	9:15:39 AM	Main Vac valve opened
5/16/2011	9:15:39 AM	Bypass valve opened
5/16/2011	9:15:39 AM	Helium MFC set to  100.000000
5/16/2011	9:15:39 AM	H2 MFC set to  0.000000
5/16/2011	9:15:39 AM	BCl3 MFC set to  0.000000
5/16/2011	9:15:39 AM	PHl3 MFC set to  0.000000
5/16/2011	9:15:39 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:15:39 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:15:40 AM	Tube furnace set to 0
5/16/2011	9:16:40 AM	Helium valve closed
5/16/2011	9:16:40 AM	H2 valve closed
5/16/2011	9:16:40 AM	BCl3 valve closed
5/16/2011	9:16:40 AM	PH3 valve closed
5/16/2011	9:16:40 AM	SiCl4 pre valve closed
5/16/2011	9:16:40 AM	SiCl4 post valve closed
5/16/2011	9:16:40 AM	Bubbler valve closed
5/16/2011	9:16:40 AM	Main Vac valve opened
5/16/2011	9:16:40 AM	Bypass valve opened
5/16/2011	9:16:40 AM	Helium MFC set to  0.000000
5/16/2011	9:16:40 AM	H2 MFC set to  0.000000
5/16/2011	9:16:40 AM	BCl3 MFC set to  0.000000
5/16/2011	9:16:40 AM	PHl3 MFC set to  0.000000
5/16/2011	9:16:40 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:16:40 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:16:40 AM	Tube furnace set to 0
5/16/2011	9:17:40 AM	H2 valve closed
5/16/2011	9:17:40 AM	BCl3 valve closed
5/16/2011	9:17:40 AM	PH3 valve closed
5/16/2011	9:17:40 AM	SiCl4 pre valve closed
5/16/2011	9:17:40 AM	SiCl4 post valve closed
5/16/2011	9:17:40 AM	Bubbler valve closed
5/16/2011	9:17:40 AM	Helium valve opened
5/16/2011	9:17:40 AM	Main Vac valve opened
5/16/2011	9:17:40 AM	Bypass valve opened
5/16/2011	9:17:40 AM	Helium MFC set to  100.000000
5/16/2011	9:17:40 AM	H2 MFC set to  0.000000
5/16/2011	9:17:40 AM	BCl3 MFC set to  0.000000
5/16/2011	9:17:40 AM	PHl3 MFC set to  0.000000
5/16/2011	9:17:40 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:17:40 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:17:40 AM	Tube furnace set to 0
5/16/2011	9:18:40 AM	Helium valve closed
5/16/2011	9:18:40 AM	H2 valve closed
5/16/2011	9:18:40 AM	BCl3 valve closed
5/16/2011	9:18:40 AM	PH3 valve closed
5/16/2011	9:18:40 AM	SiCl4 pre valve closed
5/16/2011	9:18:40 AM	SiCl4 post valve closed
5/16/2011	9:18:40 AM	Bubbler valve closed
5/16/2011	9:18:40 AM	Main Vac valve opened
5/16/2011	9:18:40 AM	Bypass valve opened
5/16/2011	9:18:40 AM	Helium MFC set to  0.000000
5/16/2011	9:18:40 AM	H2 MFC set to  0.000000
5/16/2011	9:18:40 AM	BCl3 MFC set to  0.000000
5/16/2011	9:18:40 AM	PHl3 MFC set to  0.000000
5/16/2011	9:18:40 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:18:40 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:18:40 AM	Tube furnace set to 0
5/16/2011	9:19:40 AM	H2 valve closed
5/16/2011	9:19:40 AM	BCl3 valve closed
5/16/2011	9:19:40 AM	PH3 valve closed
5/16/2011	9:19:40 AM	SiCl4 pre valve closed
5/16/2011	9:19:40 AM	SiCl4 post valve closed
5/16/2011	9:19:40 AM	Bubbler valve closed
5/16/2011	9:19:40 AM	Helium valve opened
5/16/2011	9:19:40 AM	Main Vac valve opened
5/16/2011	9:19:40 AM	Bypass valve opened
5/16/2011	9:19:40 AM	Helium MFC set to  100.000000
5/16/2011	9:19:40 AM	H2 MFC set to  0.000000
5/16/2011	9:19:40 AM	BCl3 MFC set to  0.000000
5/16/2011	9:19:40 AM	PHl3 MFC set to  0.000000
5/16/2011	9:19:40 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:19:40 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:19:40 AM	Tube furnace set to 0
5/16/2011	9:20:40 AM	Helium valve closed
5/16/2011	9:20:40 AM	H2 valve closed
5/16/2011	9:20:40 AM	BCl3 valve closed
5/16/2011	9:20:40 AM	PH3 valve closed
5/16/2011	9:20:40 AM	SiCl4 pre valve closed
5/16/2011	9:20:40 AM	SiCl4 post valve closed
5/16/2011	9:20:40 AM	Bubbler valve closed
5/16/2011	9:20:40 AM	Main Vac valve opened
5/16/2011	9:20:40 AM	Bypass valve opened
5/16/2011	9:20:40 AM	Helium MFC set to  0.000000
5/16/2011	9:20:40 AM	H2 MFC set to  0.000000
5/16/2011	9:20:40 AM	BCl3 MFC set to  0.000000
5/16/2011	9:20:40 AM	PHl3 MFC set to  0.000000
5/16/2011	9:20:40 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:20:40 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:20:41 AM	Tube furnace set to 0
5/16/2011	9:21:41 AM	H2 valve closed
5/16/2011	9:21:41 AM	BCl3 valve closed
5/16/2011	9:21:41 AM	PH3 valve closed
5/16/2011	9:21:41 AM	SiCl4 pre valve closed
5/16/2011	9:21:41 AM	SiCl4 post valve closed
5/16/2011	9:21:41 AM	Bubbler valve closed
5/16/2011	9:21:41 AM	Helium valve opened
5/16/2011	9:21:41 AM	Main Vac valve opened
5/16/2011	9:21:41 AM	Bypass valve opened
5/16/2011	9:21:41 AM	Helium MFC set to  100.000000
5/16/2011	9:21:41 AM	H2 MFC set to  0.000000
5/16/2011	9:21:41 AM	BCl3 MFC set to  0.000000
5/16/2011	9:21:41 AM	PHl3 MFC set to  0.000000
5/16/2011	9:21:41 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:21:41 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:21:41 AM	Tube furnace set to 0
5/16/2011	9:22:41 AM	Helium valve closed
5/16/2011	9:22:41 AM	H2 valve closed
5/16/2011	9:22:41 AM	BCl3 valve closed
5/16/2011	9:22:41 AM	PH3 valve closed
5/16/2011	9:22:41 AM	SiCl4 pre valve closed
5/16/2011	9:22:41 AM	SiCl4 post valve closed
5/16/2011	9:22:41 AM	Bubbler valve closed
5/16/2011	9:22:41 AM	Main Vac valve opened
5/16/2011	9:22:41 AM	Bypass valve opened
5/16/2011	9:22:41 AM	Helium MFC set to  0.000000
5/16/2011	9:22:41 AM	H2 MFC set to  0.000000
5/16/2011	9:22:41 AM	BCl3 MFC set to  0.000000
5/16/2011	9:22:41 AM	PHl3 MFC set to  0.000000
5/16/2011	9:22:41 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:22:41 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:22:41 AM	Tube furnace set to 0
5/16/2011	9:23:41 AM	H2 valve closed
5/16/2011	9:23:41 AM	BCl3 valve closed
5/16/2011	9:23:41 AM	PH3 valve closed
5/16/2011	9:23:41 AM	SiCl4 pre valve closed
5/16/2011	9:23:41 AM	SiCl4 post valve closed
5/16/2011	9:23:41 AM	Bubbler valve closed
5/16/2011	9:23:41 AM	Helium valve opened
5/16/2011	9:23:41 AM	Main Vac valve opened
5/16/2011	9:23:41 AM	Bypass valve opened
5/16/2011	9:23:41 AM	Helium MFC set to  100.000000
5/16/2011	9:23:41 AM	H2 MFC set to  0.000000
5/16/2011	9:23:41 AM	BCl3 MFC set to  0.000000
5/16/2011	9:23:41 AM	PHl3 MFC set to  0.000000
5/16/2011	9:23:41 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:23:41 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:23:41 AM	Tube furnace set to 0
5/16/2011	9:24:41 AM	Helium valve closed
5/16/2011	9:24:41 AM	H2 valve closed
5/16/2011	9:24:41 AM	BCl3 valve closed
5/16/2011	9:24:41 AM	PH3 valve closed
5/16/2011	9:24:41 AM	SiCl4 pre valve closed
5/16/2011	9:24:41 AM	SiCl4 post valve closed
5/16/2011	9:24:41 AM	Bubbler valve closed
5/16/2011	9:24:41 AM	Main Vac valve opened
5/16/2011	9:24:41 AM	Bypass valve opened
5/16/2011	9:24:41 AM	Helium MFC set to  0.000000
5/16/2011	9:24:41 AM	H2 MFC set to  0.000000
5/16/2011	9:24:41 AM	BCl3 MFC set to  0.000000
5/16/2011	9:24:41 AM	PHl3 MFC set to  0.000000
5/16/2011	9:24:41 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:24:41 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:24:41 AM	Tube furnace set to 0
5/16/2011	9:25:41 AM	H2 valve closed
5/16/2011	9:25:41 AM	BCl3 valve closed
5/16/2011	9:25:41 AM	PH3 valve closed
5/16/2011	9:25:41 AM	SiCl4 pre valve closed
5/16/2011	9:25:41 AM	SiCl4 post valve closed
5/16/2011	9:25:41 AM	Bubbler valve closed
5/16/2011	9:25:41 AM	Helium valve opened
5/16/2011	9:25:41 AM	Main Vac valve opened
5/16/2011	9:25:41 AM	Bypass valve opened
5/16/2011	9:25:41 AM	Helium MFC set to  100.000000
5/16/2011	9:25:41 AM	H2 MFC set to  0.000000
5/16/2011	9:25:41 AM	BCl3 MFC set to  0.000000
5/16/2011	9:25:41 AM	PHl3 MFC set to  0.000000
5/16/2011	9:25:41 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:25:41 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:25:42 AM	Tube furnace set to 0
5/16/2011	9:26:42 AM	Helium valve closed
5/16/2011	9:26:42 AM	H2 valve closed
5/16/2011	9:26:42 AM	BCl3 valve closed
5/16/2011	9:26:42 AM	PH3 valve closed
5/16/2011	9:26:42 AM	SiCl4 pre valve closed
5/16/2011	9:26:42 AM	SiCl4 post valve closed
5/16/2011	9:26:42 AM	Bubbler valve closed
5/16/2011	9:26:42 AM	Main Vac valve opened
5/16/2011	9:26:42 AM	Bypass valve opened
5/16/2011	9:26:42 AM	Helium MFC set to  0.000000
5/16/2011	9:26:42 AM	H2 MFC set to  0.000000
5/16/2011	9:26:42 AM	BCl3 MFC set to  0.000000
5/16/2011	9:26:42 AM	PHl3 MFC set to  0.000000
5/16/2011	9:26:42 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:26:42 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:26:42 AM	Tube furnace set to 0
5/16/2011	9:27:42 AM	H2 valve closed
5/16/2011	9:27:42 AM	BCl3 valve closed
5/16/2011	9:27:42 AM	PH3 valve closed
5/16/2011	9:27:42 AM	SiCl4 pre valve closed
5/16/2011	9:27:42 AM	SiCl4 post valve closed
5/16/2011	9:27:42 AM	Bubbler valve closed
5/16/2011	9:27:42 AM	Helium valve opened
5/16/2011	9:27:42 AM	Main Vac valve opened
5/16/2011	9:27:42 AM	Bypass valve opened
5/16/2011	9:27:42 AM	Helium MFC set to  100.000000
5/16/2011	9:27:42 AM	H2 MFC set to  0.000000
5/16/2011	9:27:42 AM	BCl3 MFC set to  0.000000
5/16/2011	9:27:42 AM	PHl3 MFC set to  0.000000
5/16/2011	9:27:42 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:27:42 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:27:42 AM	Tube furnace set to 0
5/16/2011	9:28:42 AM	Helium valve closed
5/16/2011	9:28:42 AM	H2 valve closed
5/16/2011	9:28:42 AM	BCl3 valve closed
5/16/2011	9:28:42 AM	PH3 valve closed
5/16/2011	9:28:42 AM	SiCl4 pre valve closed
5/16/2011	9:28:42 AM	SiCl4 post valve closed
5/16/2011	9:28:42 AM	Bubbler valve closed
5/16/2011	9:28:42 AM	Main Vac valve opened
5/16/2011	9:28:42 AM	Bypass valve opened
5/16/2011	9:28:42 AM	Helium MFC set to  0.000000
5/16/2011	9:28:42 AM	H2 MFC set to  0.000000
5/16/2011	9:28:42 AM	BCl3 MFC set to  0.000000
5/16/2011	9:28:42 AM	PHl3 MFC set to  0.000000
5/16/2011	9:28:42 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:28:42 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:28:42 AM	Tube furnace set to 0
5/16/2011	9:29:42 AM	H2 valve closed
5/16/2011	9:29:42 AM	BCl3 valve closed
5/16/2011	9:29:42 AM	PH3 valve closed
5/16/2011	9:29:42 AM	SiCl4 pre valve closed
5/16/2011	9:29:42 AM	SiCl4 post valve closed
5/16/2011	9:29:42 AM	Bubbler valve closed
5/16/2011	9:29:42 AM	Helium valve opened
5/16/2011	9:29:42 AM	Main Vac valve opened
5/16/2011	9:29:42 AM	Bypass valve opened
5/16/2011	9:29:42 AM	Helium MFC set to  100.000000
5/16/2011	9:29:42 AM	H2 MFC set to  0.000000
5/16/2011	9:29:42 AM	BCl3 MFC set to  0.000000
5/16/2011	9:29:42 AM	PHl3 MFC set to  0.000000
5/16/2011	9:29:42 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:29:42 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:29:42 AM	Tube furnace set to 0
5/16/2011	9:30:42 AM	Helium valve closed
5/16/2011	9:30:42 AM	H2 valve closed
5/16/2011	9:30:42 AM	BCl3 valve closed
5/16/2011	9:30:42 AM	PH3 valve closed
5/16/2011	9:30:42 AM	SiCl4 pre valve closed
5/16/2011	9:30:42 AM	SiCl4 post valve closed
5/16/2011	9:30:42 AM	Bubbler valve closed
5/16/2011	9:30:42 AM	Main Vac valve opened
5/16/2011	9:30:42 AM	Bypass valve opened
5/16/2011	9:30:42 AM	Helium MFC set to  0.000000
5/16/2011	9:30:42 AM	H2 MFC set to  0.000000
5/16/2011	9:30:42 AM	BCl3 MFC set to  0.000000
5/16/2011	9:30:42 AM	PHl3 MFC set to  0.000000
5/16/2011	9:30:42 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:30:42 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:30:43 AM	Tube furnace set to 0
5/16/2011	9:30:44 AM	Run finished at 9:30 AM
5/16/2011	9:30:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/16/2011	9:35:22 AM	Main Vac valve closed
5/16/2011	9:35:39 AM	Main Vac valve opened
5/16/2011	9:36:00 AM	Helium MFC set to  100.000000
5/16/2011	9:36:05 AM	Helium valve opened
5/16/2011	9:36:41 AM	Helium valve closed
5/16/2011	9:36:46 AM	Helium MFC set to  0.000000
5/16/2011	9:38:14 AM	Recipe started at 9:38 AM
5/16/2011	9:38:14 AM	Helium valve closed
5/16/2011	9:38:14 AM	BCl3 valve closed
5/16/2011	9:38:14 AM	PH3 valve closed
5/16/2011	9:38:14 AM	SiCl4 pre valve closed
5/16/2011	9:38:14 AM	SiCl4 post valve closed
5/16/2011	9:38:14 AM	Main Vac valve closed
5/16/2011	9:38:14 AM	Bypass valve closed
5/16/2011	9:38:14 AM	Bubbler valve closed
5/16/2011	9:38:14 AM	H2 valve opened
5/16/2011	9:38:14 AM	Helium MFC set to  0.000000
5/16/2011	9:38:14 AM	H2 MFC set to  500.000000
5/16/2011	9:38:14 AM	BCl3 MFC set to  0.000000
5/16/2011	9:38:14 AM	PHl3 MFC set to  0.000000
5/16/2011	9:38:14 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:38:14 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:38:14 AM	Tube furnace set to 0
5/16/2011	9:39:37 AM	Helium valve closed
5/16/2011	9:39:37 AM	BCl3 valve closed
5/16/2011	9:39:37 AM	PH3 valve closed
5/16/2011	9:39:37 AM	SiCl4 pre valve closed
5/16/2011	9:39:37 AM	SiCl4 post valve closed
5/16/2011	9:39:37 AM	Main Vac valve closed
5/16/2011	9:39:37 AM	Bypass valve closed
5/16/2011	9:39:37 AM	H2 valve opened
5/16/2011	9:39:37 AM	Bubbler valve opened
5/16/2011	9:39:37 AM	Helium MFC set to  0.000000
5/16/2011	9:39:37 AM	H2 MFC set to  500.000000
5/16/2011	9:39:37 AM	BCl3 MFC set to  0.000000
5/16/2011	9:39:37 AM	PHl3 MFC set to  0.000000
5/16/2011	9:39:37 AM	SiCl4 MFC set to  0.000000
5/16/2011	9:39:37 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:39:37 AM	Tube furnace set to 1000
5/16/2011	9:59:37 AM	Helium valve closed
5/16/2011	9:59:37 AM	PH3 valve closed
5/16/2011	9:59:37 AM	Main Vac valve closed
5/16/2011	9:59:37 AM	Bypass valve closed
5/16/2011	9:59:37 AM	H2 valve opened
5/16/2011	9:59:37 AM	BCl3 valve opened
5/16/2011	9:59:37 AM	SiCl4 pre valve opened
5/16/2011	9:59:37 AM	SiCl4 post valve opened
5/16/2011	9:59:37 AM	Bubbler valve opened
5/16/2011	9:59:37 AM	Helium MFC set to  0.000000
5/16/2011	9:59:37 AM	H2 MFC set to  500.000000
5/16/2011	9:59:37 AM	BCl3 MFC set to  3.000000
5/16/2011	9:59:37 AM	PHl3 MFC set to  0.000000
5/16/2011	9:59:37 AM	SiCl4 MFC set to  50.000000
5/16/2011	9:59:37 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	9:59:37 AM	Tube furnace set to 1000
5/16/2011	10:19:37 AM	H2 valve closed
5/16/2011	10:19:37 AM	BCl3 valve closed
5/16/2011	10:19:37 AM	PH3 valve closed
5/16/2011	10:19:37 AM	SiCl4 pre valve closed
5/16/2011	10:19:37 AM	SiCl4 post valve closed
5/16/2011	10:19:37 AM	Main Vac valve closed
5/16/2011	10:19:37 AM	Bypass valve closed
5/16/2011	10:19:37 AM	Helium valve opened
5/16/2011	10:19:37 AM	Bubbler valve opened
5/16/2011	10:19:38 AM	Helium MFC set to  500.000000
5/16/2011	10:19:38 AM	H2 MFC set to  0.000000
5/16/2011	10:19:38 AM	BCl3 MFC set to  0.000000
5/16/2011	10:19:38 AM	PHl3 MFC set to  0.000000
5/16/2011	10:19:38 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:19:38 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:19:38 AM	Tube furnace set to 0
5/16/2011	10:39:38 AM	Helium valve closed
5/16/2011	10:39:38 AM	H2 valve closed
5/16/2011	10:39:38 AM	BCl3 valve closed
5/16/2011	10:39:38 AM	PH3 valve closed
5/16/2011	10:39:38 AM	SiCl4 pre valve closed
5/16/2011	10:39:38 AM	SiCl4 post valve closed
5/16/2011	10:39:38 AM	Main Vac valve closed
5/16/2011	10:39:38 AM	Bypass valve closed
5/16/2011	10:39:38 AM	Bubbler valve closed
5/16/2011	10:39:38 AM	Helium MFC set to  0.000000
5/16/2011	10:39:38 AM	H2 MFC set to  0.000000
5/16/2011	10:39:38 AM	BCl3 MFC set to  0.000000
5/16/2011	10:39:38 AM	PHl3 MFC set to  0.000000
5/16/2011	10:39:38 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:39:38 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:39:38 AM	Tube furnace set to 0
5/16/2011	10:39:38 AM	Run finished at 10:39 AM
5/16/2011	10:45:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/16/2011	10:45:38 AM	Recipe started at 10:45 AM
5/16/2011	10:45:38 AM	Helium valve closed
5/16/2011	10:45:38 AM	H2 valve closed
5/16/2011	10:45:38 AM	BCl3 valve closed
5/16/2011	10:45:38 AM	PH3 valve closed
5/16/2011	10:45:38 AM	SiCl4 pre valve closed
5/16/2011	10:45:38 AM	SiCl4 post valve closed
5/16/2011	10:45:38 AM	Main Vac valve closed
5/16/2011	10:45:38 AM	Bubbler valve closed
5/16/2011	10:45:38 AM	Bypass valve opened
5/16/2011	10:45:38 AM	Helium MFC set to  0.000000
5/16/2011	10:45:38 AM	H2 MFC set to  0.000000
5/16/2011	10:45:38 AM	BCl3 MFC set to  0.000000
5/16/2011	10:45:38 AM	PHl3 MFC set to  0.000000
5/16/2011	10:45:38 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:45:38 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:45:38 AM	Tube furnace set to 0
5/16/2011	10:46:11 AM	Helium valve closed
5/16/2011	10:46:11 AM	H2 valve closed
5/16/2011	10:46:11 AM	BCl3 valve closed
5/16/2011	10:46:11 AM	PH3 valve closed
5/16/2011	10:46:11 AM	SiCl4 pre valve closed
5/16/2011	10:46:11 AM	SiCl4 post valve closed
5/16/2011	10:46:11 AM	Bubbler valve closed
5/16/2011	10:46:11 AM	Main Vac valve opened
5/16/2011	10:46:11 AM	Bypass valve opened
5/16/2011	10:46:11 AM	Helium MFC set to  0.000000
5/16/2011	10:46:11 AM	H2 MFC set to  0.000000
5/16/2011	10:46:11 AM	BCl3 MFC set to  0.000000
5/16/2011	10:46:11 AM	PHl3 MFC set to  0.000000
5/16/2011	10:46:11 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:46:11 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:46:11 AM	Tube furnace set to 0
5/16/2011	10:47:11 AM	H2 valve closed
5/16/2011	10:47:11 AM	BCl3 valve closed
5/16/2011	10:47:11 AM	PH3 valve closed
5/16/2011	10:47:11 AM	SiCl4 pre valve closed
5/16/2011	10:47:11 AM	SiCl4 post valve closed
5/16/2011	10:47:11 AM	Bubbler valve closed
5/16/2011	10:47:11 AM	Helium valve opened
5/16/2011	10:47:11 AM	Main Vac valve opened
5/16/2011	10:47:11 AM	Bypass valve opened
5/16/2011	10:47:11 AM	Helium MFC set to  100.000000
5/16/2011	10:47:11 AM	H2 MFC set to  0.000000
5/16/2011	10:47:11 AM	BCl3 MFC set to  0.000000
5/16/2011	10:47:11 AM	PHl3 MFC set to  0.000000
5/16/2011	10:47:11 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:47:11 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:47:11 AM	Tube furnace set to 0
5/16/2011	10:48:11 AM	Helium valve closed
5/16/2011	10:48:11 AM	H2 valve closed
5/16/2011	10:48:11 AM	BCl3 valve closed
5/16/2011	10:48:11 AM	PH3 valve closed
5/16/2011	10:48:11 AM	SiCl4 pre valve closed
5/16/2011	10:48:11 AM	SiCl4 post valve closed
5/16/2011	10:48:11 AM	Bubbler valve closed
5/16/2011	10:48:11 AM	Main Vac valve opened
5/16/2011	10:48:11 AM	Bypass valve opened
5/16/2011	10:48:11 AM	Helium MFC set to  0.000000
5/16/2011	10:48:11 AM	H2 MFC set to  0.000000
5/16/2011	10:48:11 AM	BCl3 MFC set to  0.000000
5/16/2011	10:48:11 AM	PHl3 MFC set to  0.000000
5/16/2011	10:48:11 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:48:11 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:48:11 AM	Tube furnace set to 0
5/16/2011	10:49:11 AM	H2 valve closed
5/16/2011	10:49:11 AM	BCl3 valve closed
5/16/2011	10:49:11 AM	PH3 valve closed
5/16/2011	10:49:11 AM	SiCl4 pre valve closed
5/16/2011	10:49:11 AM	SiCl4 post valve closed
5/16/2011	10:49:11 AM	Bubbler valve closed
5/16/2011	10:49:11 AM	Helium valve opened
5/16/2011	10:49:11 AM	Main Vac valve opened
5/16/2011	10:49:11 AM	Bypass valve opened
5/16/2011	10:49:11 AM	Helium MFC set to  100.000000
5/16/2011	10:49:11 AM	H2 MFC set to  0.000000
5/16/2011	10:49:11 AM	BCl3 MFC set to  0.000000
5/16/2011	10:49:11 AM	PHl3 MFC set to  0.000000
5/16/2011	10:49:11 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:49:11 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:49:11 AM	Tube furnace set to 0
5/16/2011	10:50:11 AM	Helium valve closed
5/16/2011	10:50:11 AM	H2 valve closed
5/16/2011	10:50:11 AM	BCl3 valve closed
5/16/2011	10:50:11 AM	PH3 valve closed
5/16/2011	10:50:11 AM	SiCl4 pre valve closed
5/16/2011	10:50:11 AM	SiCl4 post valve closed
5/16/2011	10:50:11 AM	Bubbler valve closed
5/16/2011	10:50:11 AM	Main Vac valve opened
5/16/2011	10:50:11 AM	Bypass valve opened
5/16/2011	10:50:11 AM	Helium MFC set to  0.000000
5/16/2011	10:50:11 AM	H2 MFC set to  0.000000
5/16/2011	10:50:11 AM	BCl3 MFC set to  0.000000
5/16/2011	10:50:11 AM	PHl3 MFC set to  0.000000
5/16/2011	10:50:11 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:50:11 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:50:12 AM	Tube furnace set to 0
5/16/2011	10:51:12 AM	H2 valve closed
5/16/2011	10:51:12 AM	BCl3 valve closed
5/16/2011	10:51:12 AM	PH3 valve closed
5/16/2011	10:51:12 AM	SiCl4 pre valve closed
5/16/2011	10:51:12 AM	SiCl4 post valve closed
5/16/2011	10:51:12 AM	Bubbler valve closed
5/16/2011	10:51:12 AM	Helium valve opened
5/16/2011	10:51:12 AM	Main Vac valve opened
5/16/2011	10:51:12 AM	Bypass valve opened
5/16/2011	10:51:12 AM	Helium MFC set to  100.000000
5/16/2011	10:51:12 AM	H2 MFC set to  0.000000
5/16/2011	10:51:12 AM	BCl3 MFC set to  0.000000
5/16/2011	10:51:12 AM	PHl3 MFC set to  0.000000
5/16/2011	10:51:12 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:51:12 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:51:12 AM	Tube furnace set to 0
5/16/2011	10:52:12 AM	Helium valve closed
5/16/2011	10:52:12 AM	H2 valve closed
5/16/2011	10:52:12 AM	BCl3 valve closed
5/16/2011	10:52:12 AM	PH3 valve closed
5/16/2011	10:52:12 AM	SiCl4 pre valve closed
5/16/2011	10:52:12 AM	SiCl4 post valve closed
5/16/2011	10:52:12 AM	Bubbler valve closed
5/16/2011	10:52:12 AM	Main Vac valve opened
5/16/2011	10:52:12 AM	Bypass valve opened
5/16/2011	10:52:12 AM	Helium MFC set to  0.000000
5/16/2011	10:52:12 AM	H2 MFC set to  0.000000
5/16/2011	10:52:12 AM	BCl3 MFC set to  0.000000
5/16/2011	10:52:12 AM	PHl3 MFC set to  0.000000
5/16/2011	10:52:12 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:52:12 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:52:12 AM	Tube furnace set to 0
5/16/2011	10:53:12 AM	H2 valve closed
5/16/2011	10:53:12 AM	BCl3 valve closed
5/16/2011	10:53:12 AM	PH3 valve closed
5/16/2011	10:53:12 AM	SiCl4 pre valve closed
5/16/2011	10:53:12 AM	SiCl4 post valve closed
5/16/2011	10:53:12 AM	Bubbler valve closed
5/16/2011	10:53:12 AM	Helium valve opened
5/16/2011	10:53:12 AM	Main Vac valve opened
5/16/2011	10:53:12 AM	Bypass valve opened
5/16/2011	10:53:12 AM	Helium MFC set to  100.000000
5/16/2011	10:53:12 AM	H2 MFC set to  0.000000
5/16/2011	10:53:12 AM	BCl3 MFC set to  0.000000
5/16/2011	10:53:12 AM	PHl3 MFC set to  0.000000
5/16/2011	10:53:12 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:53:12 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:53:12 AM	Tube furnace set to 0
5/16/2011	10:54:12 AM	Helium valve closed
5/16/2011	10:54:12 AM	H2 valve closed
5/16/2011	10:54:12 AM	BCl3 valve closed
5/16/2011	10:54:12 AM	PH3 valve closed
5/16/2011	10:54:12 AM	SiCl4 pre valve closed
5/16/2011	10:54:12 AM	SiCl4 post valve closed
5/16/2011	10:54:12 AM	Bubbler valve closed
5/16/2011	10:54:12 AM	Main Vac valve opened
5/16/2011	10:54:12 AM	Bypass valve opened
5/16/2011	10:54:12 AM	Helium MFC set to  0.000000
5/16/2011	10:54:12 AM	H2 MFC set to  0.000000
5/16/2011	10:54:12 AM	BCl3 MFC set to  0.000000
5/16/2011	10:54:12 AM	PHl3 MFC set to  0.000000
5/16/2011	10:54:12 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:54:12 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:54:12 AM	Tube furnace set to 0
5/16/2011	10:55:12 AM	H2 valve closed
5/16/2011	10:55:12 AM	BCl3 valve closed
5/16/2011	10:55:12 AM	PH3 valve closed
5/16/2011	10:55:12 AM	SiCl4 pre valve closed
5/16/2011	10:55:12 AM	SiCl4 post valve closed
5/16/2011	10:55:12 AM	Bubbler valve closed
5/16/2011	10:55:12 AM	Helium valve opened
5/16/2011	10:55:12 AM	Main Vac valve opened
5/16/2011	10:55:12 AM	Bypass valve opened
5/16/2011	10:55:12 AM	Helium MFC set to  100.000000
5/16/2011	10:55:12 AM	H2 MFC set to  0.000000
5/16/2011	10:55:13 AM	BCl3 MFC set to  0.000000
5/16/2011	10:55:13 AM	PHl3 MFC set to  0.000000
5/16/2011	10:55:13 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:55:13 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:55:13 AM	Tube furnace set to 0
5/16/2011	10:56:13 AM	Helium valve closed
5/16/2011	10:56:13 AM	H2 valve closed
5/16/2011	10:56:13 AM	BCl3 valve closed
5/16/2011	10:56:13 AM	PH3 valve closed
5/16/2011	10:56:13 AM	SiCl4 pre valve closed
5/16/2011	10:56:13 AM	SiCl4 post valve closed
5/16/2011	10:56:13 AM	Bubbler valve closed
5/16/2011	10:56:13 AM	Main Vac valve opened
5/16/2011	10:56:13 AM	Bypass valve opened
5/16/2011	10:56:13 AM	Helium MFC set to  0.000000
5/16/2011	10:56:13 AM	H2 MFC set to  0.000000
5/16/2011	10:56:13 AM	BCl3 MFC set to  0.000000
5/16/2011	10:56:13 AM	PHl3 MFC set to  0.000000
5/16/2011	10:56:13 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:56:13 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:56:13 AM	Tube furnace set to 0
5/16/2011	10:57:13 AM	H2 valve closed
5/16/2011	10:57:13 AM	BCl3 valve closed
5/16/2011	10:57:13 AM	PH3 valve closed
5/16/2011	10:57:13 AM	SiCl4 pre valve closed
5/16/2011	10:57:13 AM	SiCl4 post valve closed
5/16/2011	10:57:13 AM	Bubbler valve closed
5/16/2011	10:57:13 AM	Helium valve opened
5/16/2011	10:57:13 AM	Main Vac valve opened
5/16/2011	10:57:13 AM	Bypass valve opened
5/16/2011	10:57:13 AM	Helium MFC set to  100.000000
5/16/2011	10:57:13 AM	H2 MFC set to  0.000000
5/16/2011	10:57:13 AM	BCl3 MFC set to  0.000000
5/16/2011	10:57:13 AM	PHl3 MFC set to  0.000000
5/16/2011	10:57:13 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:57:13 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:57:13 AM	Tube furnace set to 0
5/16/2011	10:58:13 AM	Helium valve closed
5/16/2011	10:58:13 AM	H2 valve closed
5/16/2011	10:58:13 AM	BCl3 valve closed
5/16/2011	10:58:13 AM	PH3 valve closed
5/16/2011	10:58:13 AM	SiCl4 pre valve closed
5/16/2011	10:58:13 AM	SiCl4 post valve closed
5/16/2011	10:58:13 AM	Bubbler valve closed
5/16/2011	10:58:13 AM	Main Vac valve opened
5/16/2011	10:58:13 AM	Bypass valve opened
5/16/2011	10:58:13 AM	Helium MFC set to  0.000000
5/16/2011	10:58:13 AM	H2 MFC set to  0.000000
5/16/2011	10:58:13 AM	BCl3 MFC set to  0.000000
5/16/2011	10:58:13 AM	PHl3 MFC set to  0.000000
5/16/2011	10:58:13 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:58:13 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:58:13 AM	Tube furnace set to 0
5/16/2011	10:59:13 AM	H2 valve closed
5/16/2011	10:59:13 AM	BCl3 valve closed
5/16/2011	10:59:13 AM	PH3 valve closed
5/16/2011	10:59:13 AM	SiCl4 pre valve closed
5/16/2011	10:59:13 AM	SiCl4 post valve closed
5/16/2011	10:59:13 AM	Bubbler valve closed
5/16/2011	10:59:13 AM	Helium valve opened
5/16/2011	10:59:13 AM	Main Vac valve opened
5/16/2011	10:59:13 AM	Bypass valve opened
5/16/2011	10:59:13 AM	Helium MFC set to  100.000000
5/16/2011	10:59:13 AM	H2 MFC set to  0.000000
5/16/2011	10:59:13 AM	BCl3 MFC set to  0.000000
5/16/2011	10:59:13 AM	PHl3 MFC set to  0.000000
5/16/2011	10:59:13 AM	SiCl4 MFC set to  0.000000
5/16/2011	10:59:13 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	10:59:13 AM	Tube furnace set to 0
5/16/2011	11:00:13 AM	Helium valve closed
5/16/2011	11:00:13 AM	H2 valve closed
5/16/2011	11:00:13 AM	BCl3 valve closed
5/16/2011	11:00:13 AM	PH3 valve closed
5/16/2011	11:00:13 AM	SiCl4 pre valve closed
5/16/2011	11:00:13 AM	SiCl4 post valve closed
5/16/2011	11:00:14 AM	Bubbler valve closed
5/16/2011	11:00:14 AM	Main Vac valve opened
5/16/2011	11:00:14 AM	Bypass valve opened
5/16/2011	11:00:14 AM	Helium MFC set to  0.000000
5/16/2011	11:00:14 AM	H2 MFC set to  0.000000
5/16/2011	11:00:14 AM	BCl3 MFC set to  0.000000
5/16/2011	11:00:14 AM	PHl3 MFC set to  0.000000
5/16/2011	11:00:14 AM	SiCl4 MFC set to  0.000000
5/16/2011	11:00:14 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	11:00:14 AM	Tube furnace set to 0
5/16/2011	11:01:14 AM	H2 valve closed
5/16/2011	11:01:14 AM	BCl3 valve closed
5/16/2011	11:01:14 AM	PH3 valve closed
5/16/2011	11:01:14 AM	SiCl4 pre valve closed
5/16/2011	11:01:14 AM	SiCl4 post valve closed
5/16/2011	11:01:14 AM	Bubbler valve closed
5/16/2011	11:01:14 AM	Helium valve opened
5/16/2011	11:01:14 AM	Main Vac valve opened
5/16/2011	11:01:14 AM	Bypass valve opened
5/16/2011	11:01:14 AM	Helium MFC set to  100.000000
5/16/2011	11:01:14 AM	H2 MFC set to  0.000000
5/16/2011	11:01:14 AM	BCl3 MFC set to  0.000000
5/16/2011	11:01:14 AM	PHl3 MFC set to  0.000000
5/16/2011	11:01:14 AM	SiCl4 MFC set to  0.000000
5/16/2011	11:01:14 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	11:01:14 AM	Tube furnace set to 0
5/16/2011	11:02:14 AM	Helium valve closed
5/16/2011	11:02:14 AM	H2 valve closed
5/16/2011	11:02:14 AM	BCl3 valve closed
5/16/2011	11:02:14 AM	PH3 valve closed
5/16/2011	11:02:14 AM	SiCl4 pre valve closed
5/16/2011	11:02:14 AM	SiCl4 post valve closed
5/16/2011	11:02:14 AM	Bubbler valve closed
5/16/2011	11:02:14 AM	Main Vac valve opened
5/16/2011	11:02:14 AM	Bypass valve opened
5/16/2011	11:02:14 AM	Helium MFC set to  0.000000
5/16/2011	11:02:14 AM	H2 MFC set to  0.000000
5/16/2011	11:02:14 AM	BCl3 MFC set to  0.000000
5/16/2011	11:02:14 AM	PHl3 MFC set to  0.000000
5/16/2011	11:02:14 AM	SiCl4 MFC set to  0.000000
5/16/2011	11:02:14 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	11:02:14 AM	Tube furnace set to 0
5/16/2011	11:03:14 AM	H2 valve closed
5/16/2011	11:03:14 AM	BCl3 valve closed
5/16/2011	11:03:14 AM	PH3 valve closed
5/16/2011	11:03:14 AM	SiCl4 pre valve closed
5/16/2011	11:03:14 AM	SiCl4 post valve closed
5/16/2011	11:03:14 AM	Bubbler valve closed
5/16/2011	11:03:14 AM	Helium valve opened
5/16/2011	11:03:14 AM	Main Vac valve opened
5/16/2011	11:03:14 AM	Bypass valve opened
5/16/2011	11:03:14 AM	Helium MFC set to  100.000000
5/16/2011	11:03:14 AM	H2 MFC set to  0.000000
5/16/2011	11:03:14 AM	BCl3 MFC set to  0.000000
5/16/2011	11:03:14 AM	PHl3 MFC set to  0.000000
5/16/2011	11:03:14 AM	SiCl4 MFC set to  0.000000
5/16/2011	11:03:14 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	11:03:14 AM	Tube furnace set to 0
5/16/2011	11:04:14 AM	Helium valve closed
5/16/2011	11:04:14 AM	H2 valve closed
5/16/2011	11:04:14 AM	BCl3 valve closed
5/16/2011	11:04:14 AM	PH3 valve closed
5/16/2011	11:04:14 AM	SiCl4 pre valve closed
5/16/2011	11:04:14 AM	SiCl4 post valve closed
5/16/2011	11:04:14 AM	Bubbler valve closed
5/16/2011	11:04:14 AM	Main Vac valve opened
5/16/2011	11:04:14 AM	Bypass valve opened
5/16/2011	11:04:14 AM	Helium MFC set to  0.000000
5/16/2011	11:04:14 AM	H2 MFC set to  0.000000
5/16/2011	11:04:14 AM	BCl3 MFC set to  0.000000
5/16/2011	11:04:14 AM	PHl3 MFC set to  0.000000
5/16/2011	11:04:14 AM	SiCl4 MFC set to  0.000000
5/16/2011	11:04:14 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	11:04:14 AM	Tube furnace set to 0
5/16/2011	11:05:15 AM	H2 valve closed
5/16/2011	11:05:15 AM	BCl3 valve closed
5/16/2011	11:05:15 AM	PH3 valve closed
5/16/2011	11:05:15 AM	SiCl4 pre valve closed
5/16/2011	11:05:15 AM	SiCl4 post valve closed
5/16/2011	11:05:15 AM	Bubbler valve closed
5/16/2011	11:05:15 AM	Helium valve opened
5/16/2011	11:05:15 AM	Main Vac valve opened
5/16/2011	11:05:15 AM	Bypass valve opened
5/16/2011	11:05:15 AM	Helium MFC set to  100.000000
5/16/2011	11:05:15 AM	H2 MFC set to  0.000000
5/16/2011	11:05:15 AM	BCl3 MFC set to  0.000000
5/16/2011	11:05:15 AM	PHl3 MFC set to  0.000000
5/16/2011	11:05:15 AM	SiCl4 MFC set to  0.000000
5/16/2011	11:05:15 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	11:05:15 AM	Tube furnace set to 0
5/16/2011	11:06:15 AM	Helium valve closed
5/16/2011	11:06:15 AM	H2 valve closed
5/16/2011	11:06:15 AM	BCl3 valve closed
5/16/2011	11:06:15 AM	PH3 valve closed
5/16/2011	11:06:15 AM	SiCl4 pre valve closed
5/16/2011	11:06:15 AM	SiCl4 post valve closed
5/16/2011	11:06:15 AM	Bubbler valve closed
5/16/2011	11:06:15 AM	Main Vac valve opened
5/16/2011	11:06:15 AM	Bypass valve opened
5/16/2011	11:06:15 AM	Helium MFC set to  0.000000
5/16/2011	11:06:15 AM	H2 MFC set to  0.000000
5/16/2011	11:06:15 AM	BCl3 MFC set to  0.000000
5/16/2011	11:06:15 AM	PHl3 MFC set to  0.000000
5/16/2011	11:06:15 AM	SiCl4 MFC set to  0.000000
5/16/2011	11:06:15 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	11:06:15 AM	Tube furnace set to 0
5/16/2011	11:06:16 AM	Run finished at 11:06 AM
5/16/2011	11:06:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/16/2011	11:21:32 AM	Recipe started at 11:21 AM
5/16/2011	11:21:32 AM	Helium valve closed
5/16/2011	11:21:32 AM	BCl3 valve closed
5/16/2011	11:21:32 AM	PH3 valve closed
5/16/2011	11:21:32 AM	SiCl4 pre valve closed
5/16/2011	11:21:32 AM	SiCl4 post valve closed
5/16/2011	11:21:32 AM	Main Vac valve closed
5/16/2011	11:21:32 AM	Bypass valve closed
5/16/2011	11:21:32 AM	Bubbler valve closed
5/16/2011	11:21:32 AM	H2 valve opened
5/16/2011	11:21:32 AM	Helium MFC set to  0.000000
5/16/2011	11:21:32 AM	H2 MFC set to  500.000000
5/16/2011	11:21:32 AM	BCl3 MFC set to  0.000000
5/16/2011	11:21:32 AM	PHl3 MFC set to  0.000000
5/16/2011	11:21:32 AM	SiCl4 MFC set to  0.000000
5/16/2011	11:21:32 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	11:21:32 AM	Tube furnace set to 0
5/16/2011	11:22:51 AM	Helium valve closed
5/16/2011	11:22:51 AM	BCl3 valve closed
5/16/2011	11:22:51 AM	PH3 valve closed
5/16/2011	11:22:51 AM	SiCl4 pre valve closed
5/16/2011	11:22:51 AM	SiCl4 post valve closed
5/16/2011	11:22:51 AM	Main Vac valve closed
5/16/2011	11:22:51 AM	Bypass valve closed
5/16/2011	11:22:51 AM	H2 valve opened
5/16/2011	11:22:51 AM	Bubbler valve opened
5/16/2011	11:22:51 AM	Helium MFC set to  0.000000
5/16/2011	11:22:51 AM	H2 MFC set to  500.000000
5/16/2011	11:22:51 AM	BCl3 MFC set to  0.000000
5/16/2011	11:22:51 AM	PHl3 MFC set to  0.000000
5/16/2011	11:22:51 AM	SiCl4 MFC set to  0.000000
5/16/2011	11:22:51 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	11:22:51 AM	Tube furnace set to 1000
5/16/2011	11:42:51 AM	Helium valve closed
5/16/2011	11:42:51 AM	PH3 valve closed
5/16/2011	11:42:51 AM	Main Vac valve closed
5/16/2011	11:42:51 AM	Bypass valve closed
5/16/2011	11:42:51 AM	H2 valve opened
5/16/2011	11:42:51 AM	BCl3 valve opened
5/16/2011	11:42:51 AM	SiCl4 pre valve opened
5/16/2011	11:42:51 AM	SiCl4 post valve opened
5/16/2011	11:42:51 AM	Bubbler valve opened
5/16/2011	11:42:51 AM	Helium MFC set to  0.000000
5/16/2011	11:42:51 AM	H2 MFC set to  500.000000
5/16/2011	11:42:51 AM	BCl3 MFC set to  3.000000
5/16/2011	11:42:51 AM	PHl3 MFC set to  0.000000
5/16/2011	11:42:51 AM	SiCl4 MFC set to  50.000000
5/16/2011	11:42:51 AM	Bypass solenoid MFC set to  0.000000
5/16/2011	11:42:51 AM	Tube furnace set to 1000
5/16/2011	12:02:51 PM	H2 valve closed
5/16/2011	12:02:51 PM	BCl3 valve closed
5/16/2011	12:02:51 PM	PH3 valve closed
5/16/2011	12:02:51 PM	SiCl4 pre valve closed
5/16/2011	12:02:51 PM	SiCl4 post valve closed
5/16/2011	12:02:51 PM	Main Vac valve closed
5/16/2011	12:02:51 PM	Bypass valve closed
5/16/2011	12:02:51 PM	Helium valve opened
5/16/2011	12:02:51 PM	Bubbler valve opened
5/16/2011	12:02:51 PM	Helium MFC set to  500.000000
5/16/2011	12:02:51 PM	H2 MFC set to  0.000000
5/16/2011	12:02:51 PM	BCl3 MFC set to  0.000000
5/16/2011	12:02:51 PM	PHl3 MFC set to  0.000000
5/16/2011	12:02:51 PM	SiCl4 MFC set to  0.000000
5/16/2011	12:02:51 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	12:02:52 PM	Tube furnace set to 0
5/16/2011	12:22:52 PM	Helium valve closed
5/16/2011	12:22:52 PM	H2 valve closed
5/16/2011	12:22:52 PM	BCl3 valve closed
5/16/2011	12:22:52 PM	PH3 valve closed
5/16/2011	12:22:52 PM	SiCl4 pre valve closed
5/16/2011	12:22:52 PM	SiCl4 post valve closed
5/16/2011	12:22:52 PM	Main Vac valve closed
5/16/2011	12:22:52 PM	Bypass valve closed
5/16/2011	12:22:52 PM	Bubbler valve closed
5/16/2011	12:22:52 PM	Helium MFC set to  0.000000
5/16/2011	12:22:52 PM	H2 MFC set to  0.000000
5/16/2011	12:22:52 PM	BCl3 MFC set to  0.000000
5/16/2011	12:22:52 PM	PHl3 MFC set to  0.000000
5/16/2011	12:22:52 PM	SiCl4 MFC set to  0.000000
5/16/2011	12:22:52 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	12:22:52 PM	Tube furnace set to 0
5/16/2011	12:22:52 PM	Run finished at 12:22 PM
5/16/2011	1:25:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/16/2011	1:25:59 PM	Recipe started at 1:25 PM
5/16/2011	1:25:59 PM	H2 valve closed
5/16/2011	1:25:59 PM	BCl3 valve closed
5/16/2011	1:25:59 PM	PH3 valve closed
5/16/2011	1:25:59 PM	SiCl4 pre valve closed
5/16/2011	1:25:59 PM	SiCl4 post valve closed
5/16/2011	1:25:59 PM	Main Vac valve closed
5/16/2011	1:25:59 PM	Bypass valve closed
5/16/2011	1:25:59 PM	Bubbler valve closed
5/16/2011	1:25:59 PM	Helium valve opened
5/16/2011	1:25:59 PM	Helium MFC set to  500.000000
5/16/2011	1:25:59 PM	H2 MFC set to  0.000000
5/16/2011	1:25:59 PM	BCl3 MFC set to  0.000000
5/16/2011	1:25:59 PM	PHl3 MFC set to  0.000000
5/16/2011	1:25:59 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:25:59 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:25:59 PM	Tube furnace set to 0
5/16/2011	1:26:08 PM	Helium valve closed
5/16/2011	1:26:08 PM	H2 valve closed
5/16/2011	1:26:08 PM	BCl3 valve closed
5/16/2011	1:26:08 PM	PH3 valve closed
5/16/2011	1:26:08 PM	SiCl4 pre valve closed
5/16/2011	1:26:08 PM	SiCl4 post valve closed
5/16/2011	1:26:08 PM	Main Vac valve closed
5/16/2011	1:26:08 PM	Bypass valve closed
5/16/2011	1:26:08 PM	Bubbler valve closed
5/16/2011	1:26:08 PM	Helium MFC set to  0.000000
5/16/2011	1:26:08 PM	H2 MFC set to  0.000000
5/16/2011	1:26:08 PM	BCl3 MFC set to  0.000000
5/16/2011	1:26:08 PM	PHl3 MFC set to  0.000000
5/16/2011	1:26:08 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:26:08 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:26:08 PM	Tube furnace set to 0
5/16/2011	1:26:08 PM	Run finished at 1:26 PM
5/16/2011	1:26:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/16/2011	1:40:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/16/2011	1:40:57 PM	Recipe started at 1:40 PM
5/16/2011	1:40:57 PM	Helium valve closed
5/16/2011	1:40:57 PM	H2 valve closed
5/16/2011	1:40:57 PM	BCl3 valve closed
5/16/2011	1:40:57 PM	PH3 valve closed
5/16/2011	1:40:57 PM	SiCl4 pre valve closed
5/16/2011	1:40:57 PM	SiCl4 post valve closed
5/16/2011	1:40:57 PM	Main Vac valve closed
5/16/2011	1:40:57 PM	Bubbler valve closed
5/16/2011	1:40:57 PM	Bypass valve opened
5/16/2011	1:40:57 PM	Helium MFC set to  0.000000
5/16/2011	1:40:57 PM	H2 MFC set to  0.000000
5/16/2011	1:40:57 PM	BCl3 MFC set to  0.000000
5/16/2011	1:40:57 PM	PHl3 MFC set to  0.000000
5/16/2011	1:40:57 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:40:57 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:40:57 PM	Tube furnace set to 0
5/16/2011	1:41:29 PM	Helium valve closed
5/16/2011	1:41:29 PM	H2 valve closed
5/16/2011	1:41:29 PM	BCl3 valve closed
5/16/2011	1:41:29 PM	PH3 valve closed
5/16/2011	1:41:29 PM	SiCl4 pre valve closed
5/16/2011	1:41:29 PM	SiCl4 post valve closed
5/16/2011	1:41:29 PM	Bubbler valve closed
5/16/2011	1:41:29 PM	Main Vac valve opened
5/16/2011	1:41:29 PM	Bypass valve opened
5/16/2011	1:41:29 PM	Helium MFC set to  0.000000
5/16/2011	1:41:29 PM	H2 MFC set to  0.000000
5/16/2011	1:41:29 PM	BCl3 MFC set to  0.000000
5/16/2011	1:41:29 PM	PHl3 MFC set to  0.000000
5/16/2011	1:41:29 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:41:29 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:41:29 PM	Tube furnace set to 0
5/16/2011	1:42:30 PM	H2 valve closed
5/16/2011	1:42:30 PM	BCl3 valve closed
5/16/2011	1:42:30 PM	PH3 valve closed
5/16/2011	1:42:30 PM	SiCl4 pre valve closed
5/16/2011	1:42:30 PM	SiCl4 post valve closed
5/16/2011	1:42:30 PM	Bubbler valve closed
5/16/2011	1:42:30 PM	Helium valve opened
5/16/2011	1:42:30 PM	Main Vac valve opened
5/16/2011	1:42:30 PM	Bypass valve opened
5/16/2011	1:42:30 PM	Helium MFC set to  100.000000
5/16/2011	1:42:30 PM	H2 MFC set to  0.000000
5/16/2011	1:42:30 PM	BCl3 MFC set to  0.000000
5/16/2011	1:42:30 PM	PHl3 MFC set to  0.000000
5/16/2011	1:42:30 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:42:30 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:42:30 PM	Tube furnace set to 0
5/16/2011	1:43:30 PM	Helium valve closed
5/16/2011	1:43:30 PM	H2 valve closed
5/16/2011	1:43:30 PM	BCl3 valve closed
5/16/2011	1:43:30 PM	PH3 valve closed
5/16/2011	1:43:30 PM	SiCl4 pre valve closed
5/16/2011	1:43:30 PM	SiCl4 post valve closed
5/16/2011	1:43:30 PM	Bubbler valve closed
5/16/2011	1:43:30 PM	Main Vac valve opened
5/16/2011	1:43:30 PM	Bypass valve opened
5/16/2011	1:43:30 PM	Helium MFC set to  0.000000
5/16/2011	1:43:30 PM	H2 MFC set to  0.000000
5/16/2011	1:43:30 PM	BCl3 MFC set to  0.000000
5/16/2011	1:43:30 PM	PHl3 MFC set to  0.000000
5/16/2011	1:43:30 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:43:30 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:43:30 PM	Tube furnace set to 0
5/16/2011	1:44:30 PM	H2 valve closed
5/16/2011	1:44:30 PM	BCl3 valve closed
5/16/2011	1:44:30 PM	PH3 valve closed
5/16/2011	1:44:30 PM	SiCl4 pre valve closed
5/16/2011	1:44:30 PM	SiCl4 post valve closed
5/16/2011	1:44:30 PM	Bubbler valve closed
5/16/2011	1:44:30 PM	Helium valve opened
5/16/2011	1:44:30 PM	Main Vac valve opened
5/16/2011	1:44:30 PM	Bypass valve opened
5/16/2011	1:44:30 PM	Helium MFC set to  100.000000
5/16/2011	1:44:30 PM	H2 MFC set to  0.000000
5/16/2011	1:44:30 PM	BCl3 MFC set to  0.000000
5/16/2011	1:44:30 PM	PHl3 MFC set to  0.000000
5/16/2011	1:44:30 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:44:30 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:44:30 PM	Tube furnace set to 0
5/16/2011	1:45:30 PM	Helium valve closed
5/16/2011	1:45:30 PM	H2 valve closed
5/16/2011	1:45:30 PM	BCl3 valve closed
5/16/2011	1:45:30 PM	PH3 valve closed
5/16/2011	1:45:30 PM	SiCl4 pre valve closed
5/16/2011	1:45:30 PM	SiCl4 post valve closed
5/16/2011	1:45:30 PM	Bubbler valve closed
5/16/2011	1:45:30 PM	Main Vac valve opened
5/16/2011	1:45:30 PM	Bypass valve opened
5/16/2011	1:45:30 PM	Helium MFC set to  0.000000
5/16/2011	1:45:30 PM	H2 MFC set to  0.000000
5/16/2011	1:45:30 PM	BCl3 MFC set to  0.000000
5/16/2011	1:45:30 PM	PHl3 MFC set to  0.000000
5/16/2011	1:45:30 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:45:30 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:45:30 PM	Tube furnace set to 0
5/16/2011	1:46:30 PM	H2 valve closed
5/16/2011	1:46:30 PM	BCl3 valve closed
5/16/2011	1:46:30 PM	PH3 valve closed
5/16/2011	1:46:30 PM	SiCl4 pre valve closed
5/16/2011	1:46:30 PM	SiCl4 post valve closed
5/16/2011	1:46:30 PM	Bubbler valve closed
5/16/2011	1:46:30 PM	Helium valve opened
5/16/2011	1:46:30 PM	Main Vac valve opened
5/16/2011	1:46:30 PM	Bypass valve opened
5/16/2011	1:46:30 PM	Helium MFC set to  100.000000
5/16/2011	1:46:30 PM	H2 MFC set to  0.000000
5/16/2011	1:46:30 PM	BCl3 MFC set to  0.000000
5/16/2011	1:46:30 PM	PHl3 MFC set to  0.000000
5/16/2011	1:46:30 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:46:30 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:46:31 PM	Tube furnace set to 0
5/16/2011	1:47:31 PM	Helium valve closed
5/16/2011	1:47:31 PM	H2 valve closed
5/16/2011	1:47:31 PM	BCl3 valve closed
5/16/2011	1:47:31 PM	PH3 valve closed
5/16/2011	1:47:31 PM	SiCl4 pre valve closed
5/16/2011	1:47:31 PM	SiCl4 post valve closed
5/16/2011	1:47:31 PM	Bubbler valve closed
5/16/2011	1:47:31 PM	Main Vac valve opened
5/16/2011	1:47:31 PM	Bypass valve opened
5/16/2011	1:47:31 PM	Helium MFC set to  0.000000
5/16/2011	1:47:31 PM	H2 MFC set to  0.000000
5/16/2011	1:47:31 PM	BCl3 MFC set to  0.000000
5/16/2011	1:47:31 PM	PHl3 MFC set to  0.000000
5/16/2011	1:47:31 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:47:31 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:47:31 PM	Tube furnace set to 0
5/16/2011	1:48:31 PM	H2 valve closed
5/16/2011	1:48:31 PM	BCl3 valve closed
5/16/2011	1:48:31 PM	PH3 valve closed
5/16/2011	1:48:31 PM	SiCl4 pre valve closed
5/16/2011	1:48:31 PM	SiCl4 post valve closed
5/16/2011	1:48:31 PM	Bubbler valve closed
5/16/2011	1:48:31 PM	Helium valve opened
5/16/2011	1:48:31 PM	Main Vac valve opened
5/16/2011	1:48:31 PM	Bypass valve opened
5/16/2011	1:48:31 PM	Helium MFC set to  100.000000
5/16/2011	1:48:31 PM	H2 MFC set to  0.000000
5/16/2011	1:48:31 PM	BCl3 MFC set to  0.000000
5/16/2011	1:48:31 PM	PHl3 MFC set to  0.000000
5/16/2011	1:48:31 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:48:31 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:48:31 PM	Tube furnace set to 0
5/16/2011	1:49:31 PM	Helium valve closed
5/16/2011	1:49:31 PM	H2 valve closed
5/16/2011	1:49:31 PM	BCl3 valve closed
5/16/2011	1:49:31 PM	PH3 valve closed
5/16/2011	1:49:31 PM	SiCl4 pre valve closed
5/16/2011	1:49:31 PM	SiCl4 post valve closed
5/16/2011	1:49:31 PM	Bubbler valve closed
5/16/2011	1:49:31 PM	Main Vac valve opened
5/16/2011	1:49:31 PM	Bypass valve opened
5/16/2011	1:49:31 PM	Helium MFC set to  0.000000
5/16/2011	1:49:31 PM	H2 MFC set to  0.000000
5/16/2011	1:49:31 PM	BCl3 MFC set to  0.000000
5/16/2011	1:49:31 PM	PHl3 MFC set to  0.000000
5/16/2011	1:49:31 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:49:31 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:49:31 PM	Tube furnace set to 0
5/16/2011	1:50:31 PM	H2 valve closed
5/16/2011	1:50:31 PM	BCl3 valve closed
5/16/2011	1:50:31 PM	PH3 valve closed
5/16/2011	1:50:31 PM	SiCl4 pre valve closed
5/16/2011	1:50:31 PM	SiCl4 post valve closed
5/16/2011	1:50:31 PM	Bubbler valve closed
5/16/2011	1:50:31 PM	Helium valve opened
5/16/2011	1:50:31 PM	Main Vac valve opened
5/16/2011	1:50:31 PM	Bypass valve opened
5/16/2011	1:50:31 PM	Helium MFC set to  100.000000
5/16/2011	1:50:31 PM	H2 MFC set to  0.000000
5/16/2011	1:50:31 PM	BCl3 MFC set to  0.000000
5/16/2011	1:50:31 PM	PHl3 MFC set to  0.000000
5/16/2011	1:50:31 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:50:31 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:50:31 PM	Tube furnace set to 0
5/16/2011	1:51:31 PM	Helium valve closed
5/16/2011	1:51:31 PM	H2 valve closed
5/16/2011	1:51:31 PM	BCl3 valve closed
5/16/2011	1:51:31 PM	PH3 valve closed
5/16/2011	1:51:31 PM	SiCl4 pre valve closed
5/16/2011	1:51:31 PM	SiCl4 post valve closed
5/16/2011	1:51:31 PM	Bubbler valve closed
5/16/2011	1:51:31 PM	Main Vac valve opened
5/16/2011	1:51:31 PM	Bypass valve opened
5/16/2011	1:51:31 PM	Helium MFC set to  0.000000
5/16/2011	1:51:31 PM	H2 MFC set to  0.000000
5/16/2011	1:51:31 PM	BCl3 MFC set to  0.000000
5/16/2011	1:51:31 PM	PHl3 MFC set to  0.000000
5/16/2011	1:51:31 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:51:31 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:51:32 PM	Tube furnace set to 0
5/16/2011	1:52:32 PM	H2 valve closed
5/16/2011	1:52:32 PM	BCl3 valve closed
5/16/2011	1:52:32 PM	PH3 valve closed
5/16/2011	1:52:32 PM	SiCl4 pre valve closed
5/16/2011	1:52:32 PM	SiCl4 post valve closed
5/16/2011	1:52:32 PM	Bubbler valve closed
5/16/2011	1:52:32 PM	Helium valve opened
5/16/2011	1:52:32 PM	Main Vac valve opened
5/16/2011	1:52:32 PM	Bypass valve opened
5/16/2011	1:52:32 PM	Helium MFC set to  100.000000
5/16/2011	1:52:32 PM	H2 MFC set to  0.000000
5/16/2011	1:52:32 PM	BCl3 MFC set to  0.000000
5/16/2011	1:52:32 PM	PHl3 MFC set to  0.000000
5/16/2011	1:52:32 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:52:32 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:52:32 PM	Tube furnace set to 0
5/16/2011	1:53:32 PM	Helium valve closed
5/16/2011	1:53:32 PM	H2 valve closed
5/16/2011	1:53:32 PM	BCl3 valve closed
5/16/2011	1:53:32 PM	PH3 valve closed
5/16/2011	1:53:32 PM	SiCl4 pre valve closed
5/16/2011	1:53:32 PM	SiCl4 post valve closed
5/16/2011	1:53:32 PM	Bubbler valve closed
5/16/2011	1:53:32 PM	Main Vac valve opened
5/16/2011	1:53:32 PM	Bypass valve opened
5/16/2011	1:53:32 PM	Helium MFC set to  0.000000
5/16/2011	1:53:32 PM	H2 MFC set to  0.000000
5/16/2011	1:53:32 PM	BCl3 MFC set to  0.000000
5/16/2011	1:53:32 PM	PHl3 MFC set to  0.000000
5/16/2011	1:53:32 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:53:32 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:53:32 PM	Tube furnace set to 0
5/16/2011	1:54:32 PM	H2 valve closed
5/16/2011	1:54:32 PM	BCl3 valve closed
5/16/2011	1:54:32 PM	PH3 valve closed
5/16/2011	1:54:32 PM	SiCl4 pre valve closed
5/16/2011	1:54:32 PM	SiCl4 post valve closed
5/16/2011	1:54:32 PM	Bubbler valve closed
5/16/2011	1:54:32 PM	Helium valve opened
5/16/2011	1:54:32 PM	Main Vac valve opened
5/16/2011	1:54:32 PM	Bypass valve opened
5/16/2011	1:54:32 PM	Helium MFC set to  100.000000
5/16/2011	1:54:32 PM	H2 MFC set to  0.000000
5/16/2011	1:54:32 PM	BCl3 MFC set to  0.000000
5/16/2011	1:54:32 PM	PHl3 MFC set to  0.000000
5/16/2011	1:54:32 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:54:32 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:54:32 PM	Tube furnace set to 0
5/16/2011	1:55:32 PM	Helium valve closed
5/16/2011	1:55:32 PM	H2 valve closed
5/16/2011	1:55:32 PM	BCl3 valve closed
5/16/2011	1:55:32 PM	PH3 valve closed
5/16/2011	1:55:32 PM	SiCl4 pre valve closed
5/16/2011	1:55:32 PM	SiCl4 post valve closed
5/16/2011	1:55:32 PM	Bubbler valve closed
5/16/2011	1:55:32 PM	Main Vac valve opened
5/16/2011	1:55:32 PM	Bypass valve opened
5/16/2011	1:55:32 PM	Helium MFC set to  0.000000
5/16/2011	1:55:32 PM	H2 MFC set to  0.000000
5/16/2011	1:55:32 PM	BCl3 MFC set to  0.000000
5/16/2011	1:55:32 PM	PHl3 MFC set to  0.000000
5/16/2011	1:55:32 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:55:32 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:55:32 PM	Tube furnace set to 0
5/16/2011	1:56:32 PM	H2 valve closed
5/16/2011	1:56:32 PM	BCl3 valve closed
5/16/2011	1:56:32 PM	PH3 valve closed
5/16/2011	1:56:32 PM	SiCl4 pre valve closed
5/16/2011	1:56:32 PM	SiCl4 post valve closed
5/16/2011	1:56:32 PM	Bubbler valve closed
5/16/2011	1:56:32 PM	Helium valve opened
5/16/2011	1:56:32 PM	Main Vac valve opened
5/16/2011	1:56:32 PM	Bypass valve opened
5/16/2011	1:56:32 PM	Helium MFC set to  100.000000
5/16/2011	1:56:32 PM	H2 MFC set to  0.000000
5/16/2011	1:56:32 PM	BCl3 MFC set to  0.000000
5/16/2011	1:56:32 PM	PHl3 MFC set to  0.000000
5/16/2011	1:56:32 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:56:32 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:56:33 PM	Tube furnace set to 0
5/16/2011	1:57:33 PM	Helium valve closed
5/16/2011	1:57:33 PM	H2 valve closed
5/16/2011	1:57:33 PM	BCl3 valve closed
5/16/2011	1:57:33 PM	PH3 valve closed
5/16/2011	1:57:33 PM	SiCl4 pre valve closed
5/16/2011	1:57:33 PM	SiCl4 post valve closed
5/16/2011	1:57:33 PM	Bubbler valve closed
5/16/2011	1:57:33 PM	Main Vac valve opened
5/16/2011	1:57:33 PM	Bypass valve opened
5/16/2011	1:57:33 PM	Helium MFC set to  0.000000
5/16/2011	1:57:33 PM	H2 MFC set to  0.000000
5/16/2011	1:57:33 PM	BCl3 MFC set to  0.000000
5/16/2011	1:57:33 PM	PHl3 MFC set to  0.000000
5/16/2011	1:57:33 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:57:33 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:57:33 PM	Tube furnace set to 0
5/16/2011	1:58:33 PM	H2 valve closed
5/16/2011	1:58:33 PM	BCl3 valve closed
5/16/2011	1:58:33 PM	PH3 valve closed
5/16/2011	1:58:33 PM	SiCl4 pre valve closed
5/16/2011	1:58:33 PM	SiCl4 post valve closed
5/16/2011	1:58:33 PM	Bubbler valve closed
5/16/2011	1:58:33 PM	Helium valve opened
5/16/2011	1:58:33 PM	Main Vac valve opened
5/16/2011	1:58:33 PM	Bypass valve opened
5/16/2011	1:58:33 PM	Helium MFC set to  100.000000
5/16/2011	1:58:33 PM	H2 MFC set to  0.000000
5/16/2011	1:58:33 PM	BCl3 MFC set to  0.000000
5/16/2011	1:58:33 PM	PHl3 MFC set to  0.000000
5/16/2011	1:58:33 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:58:33 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:58:33 PM	Tube furnace set to 0
5/16/2011	1:59:33 PM	Helium valve closed
5/16/2011	1:59:33 PM	H2 valve closed
5/16/2011	1:59:33 PM	BCl3 valve closed
5/16/2011	1:59:33 PM	PH3 valve closed
5/16/2011	1:59:33 PM	SiCl4 pre valve closed
5/16/2011	1:59:33 PM	SiCl4 post valve closed
5/16/2011	1:59:33 PM	Bubbler valve closed
5/16/2011	1:59:33 PM	Main Vac valve opened
5/16/2011	1:59:33 PM	Bypass valve opened
5/16/2011	1:59:33 PM	Helium MFC set to  0.000000
5/16/2011	1:59:33 PM	H2 MFC set to  0.000000
5/16/2011	1:59:33 PM	BCl3 MFC set to  0.000000
5/16/2011	1:59:33 PM	PHl3 MFC set to  0.000000
5/16/2011	1:59:33 PM	SiCl4 MFC set to  0.000000
5/16/2011	1:59:33 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	1:59:33 PM	Tube furnace set to 0
5/16/2011	2:00:33 PM	H2 valve closed
5/16/2011	2:00:33 PM	BCl3 valve closed
5/16/2011	2:00:33 PM	PH3 valve closed
5/16/2011	2:00:33 PM	SiCl4 pre valve closed
5/16/2011	2:00:33 PM	SiCl4 post valve closed
5/16/2011	2:00:33 PM	Bubbler valve closed
5/16/2011	2:00:33 PM	Helium valve opened
5/16/2011	2:00:33 PM	Main Vac valve opened
5/16/2011	2:00:33 PM	Bypass valve opened
5/16/2011	2:00:33 PM	Helium MFC set to  100.000000
5/16/2011	2:00:33 PM	H2 MFC set to  0.000000
5/16/2011	2:00:33 PM	BCl3 MFC set to  0.000000
5/16/2011	2:00:33 PM	PHl3 MFC set to  0.000000
5/16/2011	2:00:33 PM	SiCl4 MFC set to  0.000000
5/16/2011	2:00:33 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	2:00:33 PM	Tube furnace set to 0
5/16/2011	2:01:33 PM	Helium valve closed
5/16/2011	2:01:33 PM	H2 valve closed
5/16/2011	2:01:33 PM	BCl3 valve closed
5/16/2011	2:01:33 PM	PH3 valve closed
5/16/2011	2:01:33 PM	SiCl4 pre valve closed
5/16/2011	2:01:33 PM	SiCl4 post valve closed
5/16/2011	2:01:33 PM	Bubbler valve closed
5/16/2011	2:01:33 PM	Main Vac valve opened
5/16/2011	2:01:33 PM	Bypass valve opened
5/16/2011	2:01:33 PM	Helium MFC set to  0.000000
5/16/2011	2:01:33 PM	H2 MFC set to  0.000000
5/16/2011	2:01:33 PM	BCl3 MFC set to  0.000000
5/16/2011	2:01:33 PM	PHl3 MFC set to  0.000000
5/16/2011	2:01:33 PM	SiCl4 MFC set to  0.000000
5/16/2011	2:01:33 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	2:01:34 PM	Tube furnace set to 0
5/16/2011	2:01:35 PM	Run finished at 2:01 PM
5/16/2011	2:01:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/16/2011	2:24:07 PM	Helium MFC set to  100.000000
5/16/2011	2:24:10 PM	Helium valve opened
5/16/2011	2:25:05 PM	Helium valve closed
5/16/2011	2:25:49 PM	Helium valve opened
5/16/2011	2:27:08 PM	Helium valve closed
5/16/2011	2:27:13 PM	Helium MFC set to  0.000000
5/16/2011	2:29:02 PM	Recipe started at 2:29 PM
5/16/2011	2:29:02 PM	Helium valve closed
5/16/2011	2:29:02 PM	BCl3 valve closed
5/16/2011	2:29:02 PM	PH3 valve closed
5/16/2011	2:29:02 PM	SiCl4 pre valve closed
5/16/2011	2:29:02 PM	SiCl4 post valve closed
5/16/2011	2:29:02 PM	Main Vac valve closed
5/16/2011	2:29:02 PM	Bypass valve closed
5/16/2011	2:29:02 PM	Bubbler valve closed
5/16/2011	2:29:02 PM	H2 valve opened
5/16/2011	2:29:02 PM	Helium MFC set to  0.000000
5/16/2011	2:29:02 PM	H2 MFC set to  500.000000
5/16/2011	2:29:02 PM	BCl3 MFC set to  0.000000
5/16/2011	2:29:02 PM	PHl3 MFC set to  0.000000
5/16/2011	2:29:03 PM	SiCl4 MFC set to  0.000000
5/16/2011	2:29:03 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	2:29:03 PM	Tube furnace set to 0
5/16/2011	2:30:23 PM	Helium valve closed
5/16/2011	2:30:23 PM	BCl3 valve closed
5/16/2011	2:30:23 PM	PH3 valve closed
5/16/2011	2:30:23 PM	SiCl4 pre valve closed
5/16/2011	2:30:23 PM	SiCl4 post valve closed
5/16/2011	2:30:23 PM	Main Vac valve closed
5/16/2011	2:30:23 PM	Bypass valve closed
5/16/2011	2:30:23 PM	H2 valve opened
5/16/2011	2:30:23 PM	Bubbler valve opened
5/16/2011	2:30:23 PM	Helium MFC set to  0.000000
5/16/2011	2:30:23 PM	H2 MFC set to  500.000000
5/16/2011	2:30:23 PM	BCl3 MFC set to  0.000000
5/16/2011	2:30:23 PM	PHl3 MFC set to  0.000000
5/16/2011	2:30:23 PM	SiCl4 MFC set to  0.000000
5/16/2011	2:30:23 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	2:30:23 PM	Tube furnace set to 1000
5/16/2011	2:50:23 PM	Helium valve closed
5/16/2011	2:50:23 PM	PH3 valve closed
5/16/2011	2:50:23 PM	Main Vac valve closed
5/16/2011	2:50:23 PM	Bypass valve closed
5/16/2011	2:50:23 PM	H2 valve opened
5/16/2011	2:50:23 PM	BCl3 valve opened
5/16/2011	2:50:23 PM	SiCl4 pre valve opened
5/16/2011	2:50:23 PM	SiCl4 post valve opened
5/16/2011	2:50:23 PM	Bubbler valve opened
5/16/2011	2:50:23 PM	Helium MFC set to  0.000000
5/16/2011	2:50:23 PM	H2 MFC set to  500.000000
5/16/2011	2:50:23 PM	BCl3 MFC set to  3.000000
5/16/2011	2:50:23 PM	PHl3 MFC set to  0.000000
5/16/2011	2:50:23 PM	SiCl4 MFC set to  50.000000
5/16/2011	2:50:23 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	2:50:23 PM	Tube furnace set to 1000
5/16/2011	3:05:23 PM	H2 valve closed
5/16/2011	3:05:23 PM	BCl3 valve closed
5/16/2011	3:05:23 PM	PH3 valve closed
5/16/2011	3:05:23 PM	SiCl4 pre valve closed
5/16/2011	3:05:23 PM	SiCl4 post valve closed
5/16/2011	3:05:23 PM	Main Vac valve closed
5/16/2011	3:05:23 PM	Bypass valve closed
5/16/2011	3:05:23 PM	Helium valve opened
5/16/2011	3:05:23 PM	Bubbler valve opened
5/16/2011	3:05:23 PM	Helium MFC set to  500.000000
5/16/2011	3:05:23 PM	H2 MFC set to  0.000000
5/16/2011	3:05:23 PM	BCl3 MFC set to  0.000000
5/16/2011	3:05:23 PM	PHl3 MFC set to  0.000000
5/16/2011	3:05:23 PM	SiCl4 MFC set to  0.000000
5/16/2011	3:05:23 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	3:05:23 PM	Tube furnace set to 0
5/16/2011	3:25:23 PM	Helium valve closed
5/16/2011	3:25:23 PM	H2 valve closed
5/16/2011	3:25:23 PM	BCl3 valve closed
5/16/2011	3:25:23 PM	PH3 valve closed
5/16/2011	3:25:23 PM	SiCl4 pre valve closed
5/16/2011	3:25:23 PM	SiCl4 post valve closed
5/16/2011	3:25:23 PM	Main Vac valve closed
5/16/2011	3:25:23 PM	Bypass valve closed
5/16/2011	3:25:23 PM	Bubbler valve closed
5/16/2011	3:25:23 PM	Helium MFC set to  0.000000
5/16/2011	3:25:23 PM	H2 MFC set to  0.000000
5/16/2011	3:25:23 PM	BCl3 MFC set to  0.000000
5/16/2011	3:25:23 PM	PHl3 MFC set to  0.000000
5/16/2011	3:25:23 PM	SiCl4 MFC set to  0.000000
5/16/2011	3:25:23 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	3:25:23 PM	Tube furnace set to 0
5/16/2011	3:25:24 PM	Run finished at 3:25 PM
5/16/2011	4:00:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/16/2011	4:00:40 PM	Recipe started at 4:00 PM
5/16/2011	4:00:40 PM	Helium valve closed
5/16/2011	4:00:40 PM	H2 valve closed
5/16/2011	4:00:40 PM	BCl3 valve closed
5/16/2011	4:00:40 PM	PH3 valve closed
5/16/2011	4:00:40 PM	SiCl4 pre valve closed
5/16/2011	4:00:40 PM	SiCl4 post valve closed
5/16/2011	4:00:40 PM	Main Vac valve closed
5/16/2011	4:00:40 PM	Bubbler valve closed
5/16/2011	4:00:40 PM	Bypass valve opened
5/16/2011	4:00:40 PM	Helium MFC set to  0.000000
5/16/2011	4:00:40 PM	H2 MFC set to  0.000000
5/16/2011	4:00:40 PM	BCl3 MFC set to  0.000000
5/16/2011	4:00:40 PM	PHl3 MFC set to  0.000000
5/16/2011	4:00:40 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:00:40 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:00:40 PM	Tube furnace set to 0
5/16/2011	4:01:13 PM	Helium valve closed
5/16/2011	4:01:13 PM	H2 valve closed
5/16/2011	4:01:13 PM	BCl3 valve closed
5/16/2011	4:01:13 PM	PH3 valve closed
5/16/2011	4:01:13 PM	SiCl4 pre valve closed
5/16/2011	4:01:13 PM	SiCl4 post valve closed
5/16/2011	4:01:13 PM	Bubbler valve closed
5/16/2011	4:01:13 PM	Main Vac valve opened
5/16/2011	4:01:13 PM	Bypass valve opened
5/16/2011	4:01:13 PM	Helium MFC set to  0.000000
5/16/2011	4:01:13 PM	H2 MFC set to  0.000000
5/16/2011	4:01:13 PM	BCl3 MFC set to  0.000000
5/16/2011	4:01:13 PM	PHl3 MFC set to  0.000000
5/16/2011	4:01:13 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:01:13 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:01:13 PM	Tube furnace set to 0
5/16/2011	4:02:13 PM	H2 valve closed
5/16/2011	4:02:13 PM	BCl3 valve closed
5/16/2011	4:02:13 PM	PH3 valve closed
5/16/2011	4:02:13 PM	SiCl4 pre valve closed
5/16/2011	4:02:13 PM	SiCl4 post valve closed
5/16/2011	4:02:13 PM	Bubbler valve closed
5/16/2011	4:02:13 PM	Helium valve opened
5/16/2011	4:02:13 PM	Main Vac valve opened
5/16/2011	4:02:13 PM	Bypass valve opened
5/16/2011	4:02:13 PM	Helium MFC set to  100.000000
5/16/2011	4:02:13 PM	H2 MFC set to  0.000000
5/16/2011	4:02:13 PM	BCl3 MFC set to  0.000000
5/16/2011	4:02:13 PM	PHl3 MFC set to  0.000000
5/16/2011	4:02:13 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:02:13 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:02:13 PM	Tube furnace set to 0
5/16/2011	4:03:13 PM	Helium valve closed
5/16/2011	4:03:13 PM	H2 valve closed
5/16/2011	4:03:13 PM	BCl3 valve closed
5/16/2011	4:03:13 PM	PH3 valve closed
5/16/2011	4:03:13 PM	SiCl4 pre valve closed
5/16/2011	4:03:13 PM	SiCl4 post valve closed
5/16/2011	4:03:13 PM	Bubbler valve closed
5/16/2011	4:03:13 PM	Main Vac valve opened
5/16/2011	4:03:13 PM	Bypass valve opened
5/16/2011	4:03:13 PM	Helium MFC set to  0.000000
5/16/2011	4:03:13 PM	H2 MFC set to  0.000000
5/16/2011	4:03:13 PM	BCl3 MFC set to  0.000000
5/16/2011	4:03:13 PM	PHl3 MFC set to  0.000000
5/16/2011	4:03:13 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:03:13 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:03:13 PM	Tube furnace set to 0
5/16/2011	4:04:14 PM	H2 valve closed
5/16/2011	4:04:14 PM	BCl3 valve closed
5/16/2011	4:04:14 PM	PH3 valve closed
5/16/2011	4:04:14 PM	SiCl4 pre valve closed
5/16/2011	4:04:14 PM	SiCl4 post valve closed
5/16/2011	4:04:14 PM	Bubbler valve closed
5/16/2011	4:04:14 PM	Helium valve opened
5/16/2011	4:04:14 PM	Main Vac valve opened
5/16/2011	4:04:14 PM	Bypass valve opened
5/16/2011	4:04:14 PM	Helium MFC set to  100.000000
5/16/2011	4:04:14 PM	H2 MFC set to  0.000000
5/16/2011	4:04:14 PM	BCl3 MFC set to  0.000000
5/16/2011	4:04:14 PM	PHl3 MFC set to  0.000000
5/16/2011	4:04:14 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:04:14 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:04:14 PM	Tube furnace set to 0
5/16/2011	4:05:14 PM	Helium valve closed
5/16/2011	4:05:14 PM	H2 valve closed
5/16/2011	4:05:14 PM	BCl3 valve closed
5/16/2011	4:05:14 PM	PH3 valve closed
5/16/2011	4:05:14 PM	SiCl4 pre valve closed
5/16/2011	4:05:14 PM	SiCl4 post valve closed
5/16/2011	4:05:14 PM	Bubbler valve closed
5/16/2011	4:05:14 PM	Main Vac valve opened
5/16/2011	4:05:14 PM	Bypass valve opened
5/16/2011	4:05:14 PM	Helium MFC set to  0.000000
5/16/2011	4:05:14 PM	H2 MFC set to  0.000000
5/16/2011	4:05:14 PM	BCl3 MFC set to  0.000000
5/16/2011	4:05:14 PM	PHl3 MFC set to  0.000000
5/16/2011	4:05:14 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:05:14 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:05:14 PM	Tube furnace set to 0
5/16/2011	4:06:14 PM	H2 valve closed
5/16/2011	4:06:14 PM	BCl3 valve closed
5/16/2011	4:06:14 PM	PH3 valve closed
5/16/2011	4:06:14 PM	SiCl4 pre valve closed
5/16/2011	4:06:14 PM	SiCl4 post valve closed
5/16/2011	4:06:14 PM	Bubbler valve closed
5/16/2011	4:06:14 PM	Helium valve opened
5/16/2011	4:06:14 PM	Main Vac valve opened
5/16/2011	4:06:14 PM	Bypass valve opened
5/16/2011	4:06:14 PM	Helium MFC set to  100.000000
5/16/2011	4:06:14 PM	H2 MFC set to  0.000000
5/16/2011	4:06:14 PM	BCl3 MFC set to  0.000000
5/16/2011	4:06:14 PM	PHl3 MFC set to  0.000000
5/16/2011	4:06:14 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:06:14 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:06:14 PM	Tube furnace set to 0
5/16/2011	4:07:14 PM	Helium valve closed
5/16/2011	4:07:14 PM	H2 valve closed
5/16/2011	4:07:14 PM	BCl3 valve closed
5/16/2011	4:07:14 PM	PH3 valve closed
5/16/2011	4:07:14 PM	SiCl4 pre valve closed
5/16/2011	4:07:14 PM	SiCl4 post valve closed
5/16/2011	4:07:14 PM	Bubbler valve closed
5/16/2011	4:07:14 PM	Main Vac valve opened
5/16/2011	4:07:14 PM	Bypass valve opened
5/16/2011	4:07:14 PM	Helium MFC set to  0.000000
5/16/2011	4:07:14 PM	H2 MFC set to  0.000000
5/16/2011	4:07:14 PM	BCl3 MFC set to  0.000000
5/16/2011	4:07:14 PM	PHl3 MFC set to  0.000000
5/16/2011	4:07:14 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:07:14 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:07:14 PM	Tube furnace set to 0
5/16/2011	4:08:14 PM	H2 valve closed
5/16/2011	4:08:14 PM	BCl3 valve closed
5/16/2011	4:08:14 PM	PH3 valve closed
5/16/2011	4:08:14 PM	SiCl4 pre valve closed
5/16/2011	4:08:14 PM	SiCl4 post valve closed
5/16/2011	4:08:14 PM	Bubbler valve closed
5/16/2011	4:08:14 PM	Helium valve opened
5/16/2011	4:08:14 PM	Main Vac valve opened
5/16/2011	4:08:14 PM	Bypass valve opened
5/16/2011	4:08:14 PM	Helium MFC set to  100.000000
5/16/2011	4:08:14 PM	H2 MFC set to  0.000000
5/16/2011	4:08:14 PM	BCl3 MFC set to  0.000000
5/16/2011	4:08:14 PM	PHl3 MFC set to  0.000000
5/16/2011	4:08:14 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:08:14 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:08:15 PM	Tube furnace set to 0
5/16/2011	4:09:15 PM	Helium valve closed
5/16/2011	4:09:15 PM	H2 valve closed
5/16/2011	4:09:15 PM	BCl3 valve closed
5/16/2011	4:09:15 PM	PH3 valve closed
5/16/2011	4:09:15 PM	SiCl4 pre valve closed
5/16/2011	4:09:15 PM	SiCl4 post valve closed
5/16/2011	4:09:15 PM	Bubbler valve closed
5/16/2011	4:09:15 PM	Main Vac valve opened
5/16/2011	4:09:15 PM	Bypass valve opened
5/16/2011	4:09:15 PM	Helium MFC set to  0.000000
5/16/2011	4:09:15 PM	H2 MFC set to  0.000000
5/16/2011	4:09:15 PM	BCl3 MFC set to  0.000000
5/16/2011	4:09:15 PM	PHl3 MFC set to  0.000000
5/16/2011	4:09:15 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:09:15 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:09:15 PM	Tube furnace set to 0
5/16/2011	4:10:15 PM	H2 valve closed
5/16/2011	4:10:15 PM	BCl3 valve closed
5/16/2011	4:10:15 PM	PH3 valve closed
5/16/2011	4:10:15 PM	SiCl4 pre valve closed
5/16/2011	4:10:15 PM	SiCl4 post valve closed
5/16/2011	4:10:15 PM	Bubbler valve closed
5/16/2011	4:10:15 PM	Helium valve opened
5/16/2011	4:10:15 PM	Main Vac valve opened
5/16/2011	4:10:15 PM	Bypass valve opened
5/16/2011	4:10:15 PM	Helium MFC set to  100.000000
5/16/2011	4:10:15 PM	H2 MFC set to  0.000000
5/16/2011	4:10:15 PM	BCl3 MFC set to  0.000000
5/16/2011	4:10:15 PM	PHl3 MFC set to  0.000000
5/16/2011	4:10:15 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:10:15 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:10:15 PM	Tube furnace set to 0
5/16/2011	4:11:15 PM	Helium valve closed
5/16/2011	4:11:15 PM	H2 valve closed
5/16/2011	4:11:15 PM	BCl3 valve closed
5/16/2011	4:11:15 PM	PH3 valve closed
5/16/2011	4:11:15 PM	SiCl4 pre valve closed
5/16/2011	4:11:15 PM	SiCl4 post valve closed
5/16/2011	4:11:15 PM	Bubbler valve closed
5/16/2011	4:11:15 PM	Main Vac valve opened
5/16/2011	4:11:15 PM	Bypass valve opened
5/16/2011	4:11:15 PM	Helium MFC set to  0.000000
5/16/2011	4:11:15 PM	H2 MFC set to  0.000000
5/16/2011	4:11:15 PM	BCl3 MFC set to  0.000000
5/16/2011	4:11:15 PM	PHl3 MFC set to  0.000000
5/16/2011	4:11:15 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:11:15 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:11:15 PM	Tube furnace set to 0
5/16/2011	4:12:15 PM	H2 valve closed
5/16/2011	4:12:15 PM	BCl3 valve closed
5/16/2011	4:12:15 PM	PH3 valve closed
5/16/2011	4:12:15 PM	SiCl4 pre valve closed
5/16/2011	4:12:15 PM	SiCl4 post valve closed
5/16/2011	4:12:15 PM	Bubbler valve closed
5/16/2011	4:12:15 PM	Helium valve opened
5/16/2011	4:12:15 PM	Main Vac valve opened
5/16/2011	4:12:15 PM	Bypass valve opened
5/16/2011	4:12:15 PM	Helium MFC set to  100.000000
5/16/2011	4:12:15 PM	H2 MFC set to  0.000000
5/16/2011	4:12:15 PM	BCl3 MFC set to  0.000000
5/16/2011	4:12:15 PM	PHl3 MFC set to  0.000000
5/16/2011	4:12:15 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:12:15 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:12:15 PM	Tube furnace set to 0
5/16/2011	4:13:15 PM	Helium valve closed
5/16/2011	4:13:15 PM	H2 valve closed
5/16/2011	4:13:15 PM	BCl3 valve closed
5/16/2011	4:13:15 PM	PH3 valve closed
5/16/2011	4:13:15 PM	SiCl4 pre valve closed
5/16/2011	4:13:15 PM	SiCl4 post valve closed
5/16/2011	4:13:15 PM	Bubbler valve closed
5/16/2011	4:13:15 PM	Main Vac valve opened
5/16/2011	4:13:15 PM	Bypass valve opened
5/16/2011	4:13:15 PM	Helium MFC set to  0.000000
5/16/2011	4:13:15 PM	H2 MFC set to  0.000000
5/16/2011	4:13:15 PM	BCl3 MFC set to  0.000000
5/16/2011	4:13:16 PM	PHl3 MFC set to  0.000000
5/16/2011	4:13:16 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:13:16 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:13:16 PM	Tube furnace set to 0
5/16/2011	4:14:16 PM	H2 valve closed
5/16/2011	4:14:16 PM	BCl3 valve closed
5/16/2011	4:14:16 PM	PH3 valve closed
5/16/2011	4:14:16 PM	SiCl4 pre valve closed
5/16/2011	4:14:16 PM	SiCl4 post valve closed
5/16/2011	4:14:16 PM	Bubbler valve closed
5/16/2011	4:14:16 PM	Helium valve opened
5/16/2011	4:14:16 PM	Main Vac valve opened
5/16/2011	4:14:16 PM	Bypass valve opened
5/16/2011	4:14:16 PM	Helium MFC set to  100.000000
5/16/2011	4:14:16 PM	H2 MFC set to  0.000000
5/16/2011	4:14:16 PM	BCl3 MFC set to  0.000000
5/16/2011	4:14:16 PM	PHl3 MFC set to  0.000000
5/16/2011	4:14:16 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:14:16 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:14:16 PM	Tube furnace set to 0
5/16/2011	4:15:16 PM	Helium valve closed
5/16/2011	4:15:16 PM	H2 valve closed
5/16/2011	4:15:16 PM	BCl3 valve closed
5/16/2011	4:15:16 PM	PH3 valve closed
5/16/2011	4:15:16 PM	SiCl4 pre valve closed
5/16/2011	4:15:16 PM	SiCl4 post valve closed
5/16/2011	4:15:16 PM	Bubbler valve closed
5/16/2011	4:15:16 PM	Main Vac valve opened
5/16/2011	4:15:16 PM	Bypass valve opened
5/16/2011	4:15:16 PM	Helium MFC set to  0.000000
5/16/2011	4:15:16 PM	H2 MFC set to  0.000000
5/16/2011	4:15:16 PM	BCl3 MFC set to  0.000000
5/16/2011	4:15:16 PM	PHl3 MFC set to  0.000000
5/16/2011	4:15:16 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:15:16 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:15:16 PM	Tube furnace set to 0
5/16/2011	4:16:16 PM	H2 valve closed
5/16/2011	4:16:16 PM	BCl3 valve closed
5/16/2011	4:16:16 PM	PH3 valve closed
5/16/2011	4:16:16 PM	SiCl4 pre valve closed
5/16/2011	4:16:16 PM	SiCl4 post valve closed
5/16/2011	4:16:16 PM	Bubbler valve closed
5/16/2011	4:16:16 PM	Helium valve opened
5/16/2011	4:16:16 PM	Main Vac valve opened
5/16/2011	4:16:16 PM	Bypass valve opened
5/16/2011	4:16:16 PM	Helium MFC set to  100.000000
5/16/2011	4:16:16 PM	H2 MFC set to  0.000000
5/16/2011	4:16:16 PM	BCl3 MFC set to  0.000000
5/16/2011	4:16:16 PM	PHl3 MFC set to  0.000000
5/16/2011	4:16:16 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:16:16 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:16:16 PM	Tube furnace set to 0
5/16/2011	4:17:16 PM	Helium valve closed
5/16/2011	4:17:16 PM	H2 valve closed
5/16/2011	4:17:16 PM	BCl3 valve closed
5/16/2011	4:17:16 PM	PH3 valve closed
5/16/2011	4:17:16 PM	SiCl4 pre valve closed
5/16/2011	4:17:16 PM	SiCl4 post valve closed
5/16/2011	4:17:16 PM	Bubbler valve closed
5/16/2011	4:17:16 PM	Main Vac valve opened
5/16/2011	4:17:16 PM	Bypass valve opened
5/16/2011	4:17:16 PM	Helium MFC set to  0.000000
5/16/2011	4:17:16 PM	H2 MFC set to  0.000000
5/16/2011	4:17:16 PM	BCl3 MFC set to  0.000000
5/16/2011	4:17:16 PM	PHl3 MFC set to  0.000000
5/16/2011	4:17:16 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:17:16 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:17:17 PM	Tube furnace set to 0
5/16/2011	4:18:17 PM	H2 valve closed
5/16/2011	4:18:17 PM	BCl3 valve closed
5/16/2011	4:18:17 PM	PH3 valve closed
5/16/2011	4:18:17 PM	SiCl4 pre valve closed
5/16/2011	4:18:17 PM	SiCl4 post valve closed
5/16/2011	4:18:17 PM	Bubbler valve closed
5/16/2011	4:18:17 PM	Helium valve opened
5/16/2011	4:18:17 PM	Main Vac valve opened
5/16/2011	4:18:17 PM	Bypass valve opened
5/16/2011	4:18:17 PM	Helium MFC set to  100.000000
5/16/2011	4:18:17 PM	H2 MFC set to  0.000000
5/16/2011	4:18:17 PM	BCl3 MFC set to  0.000000
5/16/2011	4:18:17 PM	PHl3 MFC set to  0.000000
5/16/2011	4:18:17 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:18:17 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:18:17 PM	Tube furnace set to 0
5/16/2011	4:19:17 PM	Helium valve closed
5/16/2011	4:19:17 PM	H2 valve closed
5/16/2011	4:19:17 PM	BCl3 valve closed
5/16/2011	4:19:17 PM	PH3 valve closed
5/16/2011	4:19:17 PM	SiCl4 pre valve closed
5/16/2011	4:19:17 PM	SiCl4 post valve closed
5/16/2011	4:19:17 PM	Bubbler valve closed
5/16/2011	4:19:17 PM	Main Vac valve opened
5/16/2011	4:19:17 PM	Bypass valve opened
5/16/2011	4:19:17 PM	Helium MFC set to  0.000000
5/16/2011	4:19:17 PM	H2 MFC set to  0.000000
5/16/2011	4:19:17 PM	BCl3 MFC set to  0.000000
5/16/2011	4:19:17 PM	PHl3 MFC set to  0.000000
5/16/2011	4:19:17 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:19:17 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:19:17 PM	Tube furnace set to 0
5/16/2011	4:20:17 PM	H2 valve closed
5/16/2011	4:20:17 PM	BCl3 valve closed
5/16/2011	4:20:17 PM	PH3 valve closed
5/16/2011	4:20:17 PM	SiCl4 pre valve closed
5/16/2011	4:20:17 PM	SiCl4 post valve closed
5/16/2011	4:20:17 PM	Bubbler valve closed
5/16/2011	4:20:17 PM	Helium valve opened
5/16/2011	4:20:17 PM	Main Vac valve opened
5/16/2011	4:20:17 PM	Bypass valve opened
5/16/2011	4:20:17 PM	Helium MFC set to  100.000000
5/16/2011	4:20:17 PM	H2 MFC set to  0.000000
5/16/2011	4:20:17 PM	BCl3 MFC set to  0.000000
5/16/2011	4:20:17 PM	PHl3 MFC set to  0.000000
5/16/2011	4:20:17 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:20:17 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:20:17 PM	Tube furnace set to 0
5/16/2011	4:21:17 PM	Helium valve closed
5/16/2011	4:21:17 PM	H2 valve closed
5/16/2011	4:21:17 PM	BCl3 valve closed
5/16/2011	4:21:17 PM	PH3 valve closed
5/16/2011	4:21:17 PM	SiCl4 pre valve closed
5/16/2011	4:21:17 PM	SiCl4 post valve closed
5/16/2011	4:21:17 PM	Bubbler valve closed
5/16/2011	4:21:17 PM	Main Vac valve opened
5/16/2011	4:21:17 PM	Bypass valve opened
5/16/2011	4:21:17 PM	Helium MFC set to  0.000000
5/16/2011	4:21:17 PM	H2 MFC set to  0.000000
5/16/2011	4:21:17 PM	BCl3 MFC set to  0.000000
5/16/2011	4:21:17 PM	PHl3 MFC set to  0.000000
5/16/2011	4:21:17 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:21:17 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:21:17 PM	Tube furnace set to 0
5/16/2011	4:21:18 PM	Run finished at 4:21 PM
5/16/2011	4:21:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/16/2011	4:22:06 PM	Helium MFC set to  100.000000
5/16/2011	4:22:08 PM	Helium valve opened
5/16/2011	4:22:49 PM	Helium valve closed
5/16/2011	4:23:36 PM	Helium valve opened
5/16/2011	4:30:07 PM	Helium valve closed
5/16/2011	4:31:47 PM	Recipe started at 4:31 PM
5/16/2011	4:31:47 PM	Helium valve closed
5/16/2011	4:31:47 PM	BCl3 valve closed
5/16/2011	4:31:47 PM	PH3 valve closed
5/16/2011	4:31:47 PM	SiCl4 pre valve closed
5/16/2011	4:31:47 PM	SiCl4 post valve closed
5/16/2011	4:31:47 PM	Main Vac valve closed
5/16/2011	4:31:47 PM	Bypass valve closed
5/16/2011	4:31:47 PM	Bubbler valve closed
5/16/2011	4:31:47 PM	H2 valve opened
5/16/2011	4:31:47 PM	Helium MFC set to  0.000000
5/16/2011	4:31:47 PM	H2 MFC set to  500.000000
5/16/2011	4:31:47 PM	BCl3 MFC set to  0.000000
5/16/2011	4:31:47 PM	PHl3 MFC set to  0.000000
5/16/2011	4:31:47 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:31:47 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:31:47 PM	Tube furnace set to 0
5/16/2011	4:33:07 PM	Helium valve closed
5/16/2011	4:33:07 PM	BCl3 valve closed
5/16/2011	4:33:07 PM	PH3 valve closed
5/16/2011	4:33:07 PM	SiCl4 pre valve closed
5/16/2011	4:33:07 PM	SiCl4 post valve closed
5/16/2011	4:33:07 PM	Main Vac valve closed
5/16/2011	4:33:07 PM	Bypass valve closed
5/16/2011	4:33:07 PM	H2 valve opened
5/16/2011	4:33:07 PM	Bubbler valve opened
5/16/2011	4:33:07 PM	Helium MFC set to  0.000000
5/16/2011	4:33:07 PM	H2 MFC set to  500.000000
5/16/2011	4:33:07 PM	BCl3 MFC set to  0.000000
5/16/2011	4:33:07 PM	PHl3 MFC set to  0.000000
5/16/2011	4:33:07 PM	SiCl4 MFC set to  0.000000
5/16/2011	4:33:07 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:33:07 PM	Tube furnace set to 1000
5/16/2011	4:53:07 PM	Helium valve closed
5/16/2011	4:53:07 PM	PH3 valve closed
5/16/2011	4:53:07 PM	Main Vac valve closed
5/16/2011	4:53:07 PM	Bypass valve closed
5/16/2011	4:53:07 PM	H2 valve opened
5/16/2011	4:53:07 PM	BCl3 valve opened
5/16/2011	4:53:07 PM	SiCl4 pre valve opened
5/16/2011	4:53:07 PM	SiCl4 post valve opened
5/16/2011	4:53:07 PM	Bubbler valve opened
5/16/2011	4:53:07 PM	Helium MFC set to  0.000000
5/16/2011	4:53:07 PM	H2 MFC set to  500.000000
5/16/2011	4:53:07 PM	BCl3 MFC set to  3.000000
5/16/2011	4:53:07 PM	PHl3 MFC set to  0.000000
5/16/2011	4:53:07 PM	SiCl4 MFC set to  50.000000
5/16/2011	4:53:07 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	4:53:07 PM	Tube furnace set to 1000
5/16/2011	5:08:07 PM	H2 valve closed
5/16/2011	5:08:07 PM	BCl3 valve closed
5/16/2011	5:08:07 PM	PH3 valve closed
5/16/2011	5:08:07 PM	SiCl4 pre valve closed
5/16/2011	5:08:07 PM	SiCl4 post valve closed
5/16/2011	5:08:07 PM	Main Vac valve closed
5/16/2011	5:08:07 PM	Bypass valve closed
5/16/2011	5:08:07 PM	Helium valve opened
5/16/2011	5:08:07 PM	Bubbler valve opened
5/16/2011	5:08:07 PM	Helium MFC set to  500.000000
5/16/2011	5:08:07 PM	H2 MFC set to  0.000000
5/16/2011	5:08:07 PM	BCl3 MFC set to  0.000000
5/16/2011	5:08:07 PM	PHl3 MFC set to  0.000000
5/16/2011	5:08:07 PM	SiCl4 MFC set to  0.000000
5/16/2011	5:08:07 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	5:08:07 PM	Tube furnace set to 0
5/16/2011	5:28:07 PM	Helium valve closed
5/16/2011	5:28:07 PM	H2 valve closed
5/16/2011	5:28:07 PM	BCl3 valve closed
5/16/2011	5:28:07 PM	PH3 valve closed
5/16/2011	5:28:07 PM	SiCl4 pre valve closed
5/16/2011	5:28:07 PM	SiCl4 post valve closed
5/16/2011	5:28:07 PM	Main Vac valve closed
5/16/2011	5:28:07 PM	Bypass valve closed
5/16/2011	5:28:07 PM	Bubbler valve closed
5/16/2011	5:28:07 PM	Helium MFC set to  0.000000
5/16/2011	5:28:07 PM	H2 MFC set to  0.000000
5/16/2011	5:28:07 PM	BCl3 MFC set to  0.000000
5/16/2011	5:28:07 PM	PHl3 MFC set to  0.000000
5/16/2011	5:28:07 PM	SiCl4 MFC set to  0.000000
5/16/2011	5:28:07 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	5:28:07 PM	Tube furnace set to 0
5/16/2011	5:28:08 PM	Run finished at 5:28 PM
5/16/2011	6:22:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/16/2011	6:22:34 PM	Recipe started at 6:22 PM
5/16/2011	6:22:34 PM	H2 valve closed
5/16/2011	6:22:34 PM	BCl3 valve closed
5/16/2011	6:22:34 PM	PH3 valve closed
5/16/2011	6:22:34 PM	SiCl4 pre valve closed
5/16/2011	6:22:34 PM	SiCl4 post valve closed
5/16/2011	6:22:34 PM	Main Vac valve closed
5/16/2011	6:22:34 PM	Bypass valve closed
5/16/2011	6:22:34 PM	Bubbler valve closed
5/16/2011	6:22:34 PM	Helium valve opened
5/16/2011	6:22:34 PM	Helium MFC set to  500.000000
5/16/2011	6:22:34 PM	H2 MFC set to  0.000000
5/16/2011	6:22:34 PM	BCl3 MFC set to  0.000000
5/16/2011	6:22:34 PM	PHl3 MFC set to  0.000000
5/16/2011	6:22:34 PM	SiCl4 MFC set to  0.000000
5/16/2011	6:22:34 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	6:22:35 PM	Tube furnace set to 0
5/16/2011	6:22:39 PM	Helium valve closed
5/16/2011	6:22:39 PM	H2 valve closed
5/16/2011	6:22:39 PM	BCl3 valve closed
5/16/2011	6:22:39 PM	PH3 valve closed
5/16/2011	6:22:39 PM	SiCl4 pre valve closed
5/16/2011	6:22:39 PM	SiCl4 post valve closed
5/16/2011	6:22:39 PM	Main Vac valve closed
5/16/2011	6:22:39 PM	Bypass valve closed
5/16/2011	6:22:39 PM	Bubbler valve closed
5/16/2011	6:22:39 PM	Helium MFC set to  0.000000
5/16/2011	6:22:39 PM	H2 MFC set to  0.000000
5/16/2011	6:22:39 PM	BCl3 MFC set to  0.000000
5/16/2011	6:22:39 PM	PHl3 MFC set to  0.000000
5/16/2011	6:22:39 PM	SiCl4 MFC set to  0.000000
5/16/2011	6:22:39 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	6:22:39 PM	Tube furnace set to 0
5/16/2011	6:22:39 PM	Run finished at 6:22 PM
5/16/2011	6:22:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/16/2011	6:24:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/16/2011	6:24:55 PM	Recipe started at 6:24 PM
5/16/2011	6:24:55 PM	Helium valve closed
5/16/2011	6:24:55 PM	H2 valve closed
5/16/2011	6:24:55 PM	BCl3 valve closed
5/16/2011	6:24:55 PM	PH3 valve closed
5/16/2011	6:24:55 PM	SiCl4 pre valve closed
5/16/2011	6:24:55 PM	SiCl4 post valve closed
5/16/2011	6:24:55 PM	Main Vac valve closed
5/16/2011	6:24:55 PM	Bubbler valve closed
5/16/2011	6:24:55 PM	Bypass valve opened
5/16/2011	6:24:55 PM	Helium MFC set to  0.000000
5/16/2011	6:24:55 PM	H2 MFC set to  0.000000
5/16/2011	6:24:55 PM	BCl3 MFC set to  0.000000
5/16/2011	6:24:55 PM	PHl3 MFC set to  0.000000
5/16/2011	6:24:55 PM	SiCl4 MFC set to  0.000000
5/16/2011	6:24:55 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	6:24:55 PM	Tube furnace set to 0
5/16/2011	6:25:27 PM	Helium valve closed
5/16/2011	6:25:27 PM	H2 valve closed
5/16/2011	6:25:27 PM	BCl3 valve closed
5/16/2011	6:25:27 PM	PH3 valve closed
5/16/2011	6:25:27 PM	SiCl4 pre valve closed
5/16/2011	6:25:27 PM	SiCl4 post valve closed
5/16/2011	6:25:27 PM	Bubbler valve closed
5/16/2011	6:25:27 PM	Main Vac valve opened
5/16/2011	6:25:27 PM	Bypass valve opened
5/16/2011	6:25:27 PM	Helium MFC set to  0.000000
5/16/2011	6:25:27 PM	H2 MFC set to  0.000000
5/16/2011	6:25:27 PM	BCl3 MFC set to  0.000000
5/16/2011	6:25:27 PM	PHl3 MFC set to  0.000000
5/16/2011	6:25:27 PM	SiCl4 MFC set to  0.000000
5/16/2011	6:25:27 PM	Bypass solenoid MFC set to  0.000000
5/16/2011	6:25:27 PM	Tube furnace set to 0
5/16/2011	6:25:28 PM	Run finished at 6:25 PM
5/16/2011	6:25:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
